Silicon Wafers                              
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Part-No. Diameter Coating Grade Growth Type/
Dopant
Orien
tation
Resistivity
[Ohm-cm]
Thickness Finish Flat / Notch Laser Mark TTV Bow Warp Particles Q'ty
  [mm] []           [from] [to] [m] []       [m] [m] [m] [m] [slices]
                                       
square
J10001 125x125 None   CZ P/B <100> 1 3 200 20 As Cut / None <=30   <=40 / 0
J10002 125x125 None   CZ P/B <100> 1 3 200 20 Etched / None <=30   <=40 / 0
X10001 10x4 None   CZ any <100> 1 50 525 25 SSP / None / / / / 0
X10002 10x10 None / FZ P/B <100> > 10.000 525 20 SSP / None / / / / 0
X10003 5x5 None / FZ P/B <100> > 10.000 525 20 SSP / None / / / / ~250
50.8 mm
A12098 50.8 0.3 None Prime CZ P/B <100> 0,001 0,002 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12003 50.8 0.3 None Prime CZ N/As <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12054 50.8 0.3 None Prime CZ P/B <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
N12001 50.8 0.3 None Prime CZ P/B <100> > 1 275 25 DSP 2 Flats None <10 <30 <30 <10@0.5 0
C12009 50.8 0.3 None Prime CZ P/B <100> > 1 60 10 DSP 2 Flats None <5 <30 <30 SEMI cleaned 0
N12002 50.8 0.3 None Prime CZ P/B <100> > 1 275 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
A12007 50.8 0.3 None Prime CZ P/B <100> 1 2 279 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A12008 50.8 0.3 None Prime CZ N/Ph <100> 1 3 279 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A12008 50.8 0.3 None Prime CZ N/As <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
A12151 50.8 0.3 None Prime CZ P/B <100> < 0,005 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
J12031 50.8 0.3 None Prime CZ P/B <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 44
A12109 50.8 0.3 None Prime CZ N/Sb <100> 0,01 0,02 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
J12012 50.8 0.3 None Prime CZ P/B <100> 0,001 0,004 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 15
A12017 50.8 0.3 None Prime CZ P/B <100> 1 5 279 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12011 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
A12015 50.8 0.3 None Prime CZ N/Ph <100> 1 5 279 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
O12001 50.8 0.3 None Prime CZ P/B <110> 1 5 279 25 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12102 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12016 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12004 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A12033 50.8 0.3 None Prime CZ P/B <100> 1 10 381 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
B12001 50.8 0.3 None Prime CZ P/B <100> 1 10 200 25 DSP 1 Flat None <5 <30 <30 <15@0.2 0
J12011 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
A12152 50.8 0.3 None Prime CZ P/B <100> 1 5 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
J12011 50.8 0.3 None Prime CZ P/B <111> 1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 220
J12021 50.8 0.3 None Prime CZ P/B <100> 1 5 279 15 DSP 1 Flat None <10 <30 <30 <10@0.5 400
A12021 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 1.424
J12033 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <10@0.5 474
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 750
A12021 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12082 50.8 0.3 None Prime CZ P/B <111>
ON
1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12010 50.8 0.4 None Prime CZ N/Ph <111>
4 OFF
1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12030 50.8 0.3 None Prime CZ P/B <111> ON 1 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12018 50.8 0.3 None Prime CZ N/Ph <111>
4 OFF
1 20 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12032 50.8 0.3 None Prime CZ P/B <111> ON 1 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
C12010 50.8 0.3 None Prime CZ P/B <100> 1 30 60 12 DSP 1 Flat None <10 <30 <30 SEMI cleaned 0
A12091 50.8 0.3 None Prime CZ P/B <100> 4 7 250 25 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12052 50.8 0.3 None Prime CZ P/B <111>
4 OFF
5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12031 50.8 0.3 None Prime CZ N/Ph <111> ON 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12020 50.8 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <10 <30 <30 <10@0.5 100
BF12010 50.8 0.3 None Prime CZ N/Ph <100> 1 10 4000 50 SSP 2 Flats None       Semi Cleaned 4
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
I12008 50.8 0.3 None Prime CZ P/B <110> 5 10 300 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12153 50.8 0.3 None Prime CZ P/B <100> 5 10 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 50
A12035 50.8 0.3 None Prime CZ P/B <100> 10 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
A12020 50.8 0.3 None Prime CZ N/Ph <100> 10 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12076 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12154 50.8 0.3 None Prime CZ P/B <100> 10 20 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
J12023 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12023 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 359
BF12007 50.8 0.3 None Prime CZ un-
doped
<111> > 100 279 25 SSP 1 Flat None <10 <30 <30 <10@0.3 15
BB12005 50.8 0.2 None Prime FZ P/B <100> > 100 500 15 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12076 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
BU12005 50.8 0.3 None Prime CZ un-
doped
<100> > 100 725 25 SSP None None <10 <30 <30 <15@0.3 25
BB12013 50.8 0.3 None Prime FZ N/Ph <100> > 1.000 300 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
BU12006 50.8 0.3 None Prime FZ P/B <100> 4000 10.000 500 25 DSP 2 Flats None <10 <30 <30 <15@0.3 3
I12010 50.8 0.3 None Prime FZ N/Ph <100> > 5.000 300 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
BB12001 50.8 0.3 None Prime FZ in-
trinsic
<100> > 10.000 279 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
BB12006 50.8 0.3 None Prime FZ in-
trinsic
<100> > 10.000 279 25 DSP 2 Flats None <10 <30 <30 <10@0.5 0
BU12002 50.8 0.3 None Prime FZ Intrinsic <100> > 10.000 279 25 DSP 1 Flat None <10 <30 <30 <15@0.3 80
J12029 50.8 0.3 None Prime FZ N/Ph <100> > 10.000 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 128
J12027 50.8 0.3 None Prime FZ P/B <100> > 10.000 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 112
76.2 mm
A13019 76.2 0.5 None Prime CZ P/B <100> < 0,005 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A13018 76.2 0.5 None Prime CZ N/As <100> < 0,005 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13031 76.2 0.5 None Prime CZ P/B <100> 0,01 0,02 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 50
J13014 76.2 0.3 None Prime CZ P/B <100> 1 3 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13009 76.2 0.5 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 100
A13010 76.2 0.5 None Prime CZ N/Ph <100> 1 5 381 20 SSP 2 Flas None <5 <15 <15 <15@0.3 0
J13041 76.2 0.3 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L13010 76.2 0.3 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <10@0.3 25
J13045 76.2 0.3 None Test CZ P/B <100>
2.5 OFF
1 30 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
Z13008 76.2 0.3 3150 nm
wet SiO2
Prime CZ P/B <100>
2.5 OFF
1 30 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 60
A13020 76.2 0.5 None Prime CZ P/B <100> 1 10 381 50 SSP 2 Flats None <5 <30 <30 <15@0.3 0
M13001 76.2 0.5 None Prime CZ P/B <100> 1 20 381 25 DSP 2Flats None <5 <30 <30 <10@0.5 0
P13001 76.2 0.3 None Prime CZ P/B <100> 1 20 381 15 SSP 2 Flats None <5 <10 <20 <30@0.2 0
P13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 15 SSP 1 Flat None <5 <20 <20 <15@0.3 0
J13001 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
J13006 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13006 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 924
Z13020 76.2 0.3 100 nm
dry SiO2
Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 25
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 0
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 198
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 98
Z13013 76.2 0.3 1000 nm
wet SiO2
Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 45
J13043 76.2 0.3 None Prime CZ N/Ph <111> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
J13011 76.2 0.3 None Prime CZ N/Ph <100> 1 10 1000 20 SSP 2 Flats None <8 <30 <30 <15@0.3 0
A13021 76.2 0.3 None Prime CZ N/Ph <100> 1 10 1000 20 SSP 1 Flat None <5 <30 <30 <15@0.3 0
J13053 76.2 0.3 None Prime CZ N/Ph <100> 1 10 400 20 SSP 2 Flats None <5 <30 <30 <15@0.3 24
L13011 76.2 0.3 None Prime CZ P/B <100> 1 10 280 20 SSP 2 Flats None <5 <30 <30 <15@0.3 125
J13022 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 78
J13023 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 158
J13025 76.2 0.3 None Test CZ P/B <100> 1 10 381 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
J13026 76.2 0.3 None Test CZ P/B <100> 1 10 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13065 76.2 0.3 None Prime CZ P/B <100> 1 20 500 25 SSP 2 Flats None <5 <20 <20 <15@0.3 0
A13064 76.2 0.3 None Prime CZ P/B <100> 1 20 625 25 SSP 2 Flats None <5 <20 <20 <15@0.3 0
J13031 76.2 0.3 None Prime CZ N/Ph <111> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 50
BF13010 76.2 0.3 None Prime CZ P/B <100> 1 100 3000 50 SSP 2 Flats None       Semi Cleaned 15
J13013 76.2 0.3 None Prime CZ N/Ph <100> 2 20 270 10 DSP 2 Flats None <8 <30 <30 <15@0.3 49
A13003 76.2 0.3 None Prime CZ P/B <100> 5 10 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13046 76.2 0.3 None Prime CZ P/B <100> 5 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 49
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 1.000
Z13004 76.2 0.3 150 nm
dry SiO2
Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L13006 76.2 0.3 None Prime FZ N/Ph <111> > 1.000 381 25 DSP 1 Flat None <10 <30 <30 <15@0.3 65
BU13015 76.2 0.3 None Prime FZ Intrinsic <100> > 7.500 725 10 DSP 2 Flats None <10 <30 <30 <15@0.3 50
BU13003 76.2 0.3 None Prime FZ Intrinsic <100> > 10.000 500 25 SSP 2 Flats None <10 <30 <30 <15@0.3 25
BF13001 76.2 0.5 None Prime FZ Intrinsic <100> > 10.000 381 25 DSP 2 Flats None <10 <25 <30 <15@0.3 33
100 mm (Test)
L14095 100 0.3 None Test CZ P/B <100> any any 420 25 SSP 2 Flats None any any any <10@0.3 0
L14098 100 0.3 None Test CZ N/Ph <100> any any 380 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14096 100 0.3 None Test CZ P/B <100> any any 512 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14093 100 0.3 None Test CZ P/B <100> any any 525 25 SSP 2 Flats None any any any <10@0.3 0
L14094 100 0.3 None Test CZ N/Ph <100> any any 525 25 SSP 2 Flats None any any any <10@0.3 0
L14103 100 0.3 None Test CZ P/B <100> 0,1 100 525 25 SSP 2 Flats Yes <10 <30 <30 <10@0.3 0
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14217 100 0.3 None Test CZ P/B <100> 0 100 525 25 SSP 2 Flats None <15 <35 <35 <15@0.3 0
BO14003 100 0.3 None Test CZ N/Ph <100> 0,8 1,2 525 20 SSP 2 Flats None <5 <30 <30 <20@0.3 0
BO14035 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 83
BO14035 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 140
N14010 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <10@0.5 700
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 0
L14227 100 0.3 None Test CZ P/B <100> 0 100 525 25 SSP 1 Flat None <10 <40 <40 <10@0.3 0
L14117 100 0.3 None Test CZ P/B <100> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14118 100 0.3 None Test CZ P/B <100> 1 30 525 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14119 100 0.3 None Test CZ P/B <100> 1 30 275 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14120 100 0.3 None Test CZ N/Ph <111> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14121 100 0.3 None Test CZ N/Ph <100> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14122 100 0.3 None Test CZ N/As <100> < 1 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
A14017 100 0.5 None Test CZ P/B <111>
4 OFF
5 25 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14123 100 0.3 None Test FZ N/Ph <100> > 1000 380 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
100 mm (CZ)
A14035 100 0.5 None Prime CZ P/B <100> 0,001 0,002 525 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A14015 100 0.5 None Prime CZ P/B <100> 0,001 0,003 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
B14002 100 0.5 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <10 <30 <40 <15@0.3 0
B14003 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <8 <30 <40 <15@0.3 0
A14027 100 0.5 None Prime CZ N/As <100> < 0,005 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14023 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 358
BO14023 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
A14027 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
BO14028 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <20@0.2 124
L14171 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
A14034 100 0.5 None Dummy CZ n/a <100> < 0,005 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14011 100 0.5 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14022 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 400
J14016 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 300
Z14105 100 0.3 290nm
dry SiO2
Prime CZ P/B <100> 0,001 0,01 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14027 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 288
E14018 100 0.3 1400nm
wet SiO2
Prime CZ P/B <100> < 0,005 152 5 DSP 2 Flats None <5     Jars 0
J14003 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14117 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
N14005 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
A14238 100 0.5 None Prime CZ P/B <100> < 0,005 1000 25 SSP 1 Flat None <10 <30 <40 <15@0.3 0
A14036 100 0.5 None Prime CZ P/B <100> < 0,01 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14010 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
BO14010 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 375
Z14100 100 0.3 100 nm
dry SiO2
Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14019 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
J14005 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
N14004 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
BO14013 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
BO14013 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 185
A14037 100 0.3 None Prime CZ P/B <100> 0,04 0,05 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 44
L14060 100 0.3 None Prime CZ P/B <100> 0,05 0,15 525 20 SSP 2 Flats Yes <5 <30 <30 <15@0.3 0
BO14044 100 0.3 None Prime CZ P/B <100> 0,05 0,2 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 139
A14164 100 0.2 None Prime CZ P/B <100> 0,1 0,5 525 20 SSP 2 Flats None <10 <20 <20 <15@0.3 0
L14009 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <5 <30 <30 <10@0.3 139
L14033 100 0.5 None Prime CZ P/B <100> 0,5 1 285 10 E/E 2 Flats None <5 <30 <30 / 0
L14034 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14035 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A14038 100 0.5 None Prime CZ P/B <100> 0,5 2 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14032 100 0.3 None Prime CZ P/B <100> 1 3 275 25 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14001 100 0.3 None Prime CZ N/Ph <100> 0,8 1,2 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
AX14043 100 0.3 None Prime CZ P/B <100>
19.5 OFF
0 100 525 25 SSP 2 Flats None <10 < 30 < 30 <20@0.2 1
AI14005 100 0.3 None Prime CZ P/B <100> 1 100 202 4 DSP 1 Flat None <4 <35 <35 <20@0.3 100
AI14004 100 0.3 None Prime CZ P/B <100> 1 100 302 4 DSP 1 Flat None <4 <35 <35 <20@0.3 75
L14250 100 0.3 None Prime CZ P/B <100> 1 3 410 10 As Cut 1 Flat None <5     / 20
L14249 100 0.3 None Prime CZ N/Ph <100> 1 3 410 10 As Cut None None <5     / 9
L14039 100 0.3 None Prime CZ N/Ph <100> 1 3 420 10 Etched 2 Flats None <5 <30 <30 / 189
L14148 100 0.3 None Prime CZ P/B <100> 1 3 525 20 SSP 2 Flats None <5 < 30 < 30 <15@0.3 0
L14145 100 0.3 None Prime CZ P/B <100> 1 3 275 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 11
BO14038 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 217
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14149 100 0.3 None Prime CZ P/B <111> 1 3 525 20 SSP 1 Flat None <5 <30 <30 <15@0.3 0
L14046 100 0.3 None Prime CZ N/Ph <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 172
L14149 100 0.3 None Prime CZ P/B <111> 1 3 525 20 SSP 1 Flat None <5 <30 <30 <15@0.3 97
L14153 100 0.3 None Prime CZ N/Ph <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14150 100 0.3 None Prime CZ N/Ph <100> 1 3 525 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14046 100 0.3 None Prime CZ N/Ph <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14003 100 0.5 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 1.739
BO14018 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 25
Z14034 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 0
Z14034 100 0.3 50nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 25
Z14101 100 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 39
Z14016 100 0.3 1500 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14053 100 0.3 300 nm
LPCVD SiN
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14034 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14083 100 0.3 140 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14053 100 0.3 300 nm
LPCVD Nitride
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14035 100 0.3 100nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 275
BO14032 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 758
Z14049 100 0.3 250 nm
wet SiO2
Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 196
L14068 100 0.3 None Prime CZ N/Ph <111>
ON
1 5 275 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14246 100 0.3 None Prime CZ P/B <100> 1 10 925 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14040 100 0.3 None Prime CZ P/B <100> 1 10 925 20 DSP 2 Flats None <5 <30 <30 <10@0.3 123
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 90
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BB14001 100 0.3 None Prime CZ P/B <100> 1 10 200 10 DSP 2 Flat None <5 <30 <30 <10@0.5 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 79
L14037 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14014 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <20@0.2 185
L14108 100 0.2 None Prime CZ P/B <100> 1 10 380 10 DSP 2 Flats Yes <5 <30 <30 <10@0.3 156
L14233 100 0.3 None Prime CZ P/B <100> 1 10 275 20 DSP 2 Flats None <5 <30 <30 <20@0.2 59
L14043 100 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <5 <30 <30 <20@0.2 0
BU14023 100 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <5 <30 <30 <10@0.3 100
L14116 100 0.3 None Prime CZ P/B <100> 1 10 380 15 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14116 100 0.3 None Prime CZ P/B <100> 1 10 380 15 SSP 2 Flats None <5 <30 <30 <10@0.3 121
L14070 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14070 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 SSP 2 Flats None <5 <30 <30 <10@0.3 149
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <10@0.3 17
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <10@0.3 0
A14031 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <20@0.2 0
A14031 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14032 100 0.5 None Prime CZ P/B <111>
ON
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
BO14004 100 0.3 None Prime CZ N/Ph <100> 1 10 400 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14190 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14190 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 20 SSP 1 Flat None <10 <30 <30 <15@0.3 349
J14008 100 0.5 None Prime CZ P/B <111> 1 10 525 20 DSP 1 Flat None <10 <30 <30 <15@0.3 50
N14008 100 0.5 None Prime CZ P/B <110> 1 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.5 19
I14021 100 0.3 None Prime CZ P/B <110> 1 10 525 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14200 100 0.3 None Prime CZ N/Ph <100> 1 100 840 10 Etched 2 Flats None <10 <30 <30 / 50
L14201 100 0.3 None Prime CZ N/Ph <100> 1 100 380 10 Etched 2 Flats None <10 <30 <30 / 95
L14092 100 0.3 None Prime CZ P/B <100> 3 6 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
E14032 100 0.3 None Prime CZ P/B <100> 1 100 100 10 DSP 2 Flats None <10 <40 <50 / 0
L14028 100 0.3 None Prime CZ P/B <100> 4 7 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14219 100 0.3 None Prime CZ P/B <100> 5 10 200 10 SSP 2 Flats None <10 < 30 < 30 <15@0.3 161
L14220 100 0.3 None Prime CZ P/B <100> 5 10 200 10 DSP 2 Flats None <10 < 30 < 30 <15@0.3 0
L14220 100 0.3 None Prime CZ P/B <100> 5 10 200 10 DSP 2 Flats None <10 < 30 < 30 <15@0.3 213
L14191 100 0.3 None Prime CZ P/B <100> 5 10 250 10 SSP 2 Flats None <5 < 30 < 30 <10@0.3 143
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 1.650
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14136 100 0.5 20nm
LPCVD SiN
Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 25
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 1.105
Z14014 100 0.3 300 nm
wet SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 25
BO14030 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 364
Z14050 100 0.3 20 nm
dry SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
A14043 100 0.5 None Prime CZ P/B <111>
ON
5 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
I14019 100 0.3 None Prime CZ P/B <110> 5 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
Z14014 100 0.3 300 nm
wet SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14029 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <20@0.2 262
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14033 100 0.3 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 557
Z14033 100 0.5 500 nm
wet SiO2
Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
E14010 100 0.5 None Prime CZ N/Ph <100> 5 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
Z14058 100 0.5 2000 nm
wet SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 20
L14198 100 0.3 None Prime CZ P/B <111> 5 10 525 20 SSP 1 Flat None <5 < 30 < 30 <10@0.3 63
BO14005 100 0.3 None Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14005 100 0.3 None Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 215
AH14003 100 0.3 500 nm
SiN
Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 49
L14025 100 0.3 None Prime CZ P/B <100> 1 30 1000 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14226 100 0.3 None Prime CZ P/B <100> 1 30 525 25 SSP 2 Flats None <5 <30 <30 <10@0.25 10
L14025 100 0.3 None Prime CZ P/B <100> 1 30 1000 20 SSP 2 Flats None <5 <30 <30 <10@0.3 125
L14215 100 0.3 None Prime CZ P/B <100> 1 30 279 20 DSP 2 Flats None <5 <20 <30 <15@0.3 71
A14006 100 0.3 1500 nm
SiO2
Prime CZ P/B <100> 10 20 525 25 SSP 2 Flats None <10 < 30 < 30 <15@0.3 0
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14166 100 0.3 None Prime CZ P/B <100> 10 15 525 10 SSP 2 Flats None <10 < 30 < 30 <20@0.2 0
BF14013 100 0.3 None Prime CZ P/B <110> 1 30 525 20 SSP 2 Flats None <10 <30 <30 <15@0.5 100
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 1.523
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
J14015 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <15@0.3 500
BO14031 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 305
BO14016 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 0
AH14002 100 0.3 500 nm
SiN
Prime CZ P/B <100> 1 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 7
Z14055 100 0.3 150 nm
LPCVD SiN
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14040 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 14
Z14042 100 0.3 450 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14052 100 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14122 100 0.3 300 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14086 100 0.3 1000 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 70
Z14152 100 0.3 1500 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 50
L14194 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 12
L14194 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 0
L14195 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 17
BO14034 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 276
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
Z14095 100 0.3 100 nm
dry SiO2
Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 536
L14237 100 0.3 None Prime CZ P/B <100> 10 20 400 20 DSP 1 Flat None <5 <30 <30 <20@0.3 827
BO14021 100 0.3 None Prime CZ P/B <100> 10 20 400 20 DSP 1 Flat None <5 <30 <30 <30@0.2 266
L14245 100 0.3 None Prime CZ N/Ph <100> 10 20 350 10 DSP 2 Flats None <5 <30 <30 <20@0.3 0
L14245 100 0.3 None Prime CZ N/Ph <100> 10 20 350 10 DSP 2 Flats None <5 <30 <30 <20@0.3 141
L14110 100 0.3 None Prime CZ P/B <100> 10 20 350 15 DSP 2 Flats None <5 <30 <30 <20@0.3 0
L14216 100 0.3 None Prime CZ P/B <100> 10 20 300 15 DSP 2 Flats None <5 <30 <30 <20@0.3 58
L14082 100 0.3 None Prime CZ P/B <100> 10 20 725 20 DSP 2 Flats None <5 <30 <30 <10@0.3 41
L14112 100 0.3 None Prime CZ P/B <100> 10 30 1250 25 lapped 1 Flat None <5 <30 <30 SEMI cleaned 0
L14049 100 0.3 None Prime CZ N/Ph <100> 10 30 525 20 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14007 100 0.3 None Prime CZ P/B <100> 15 25 380 10 DSP 2 Flats None <5 <20 <25 <20@0.2 41
L14083 100 0.3 None Prime CZ N/Ph <100> 30 50 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 114
100 mm (FZ)
L14015 100 0.3 None Prime FZ P/B <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14209 100 0.3 None Prime FZ N/Ph <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14210 100 0.3 None Prime FZ N/Ph <100> 1 3 525 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14169 100 0.3 None Prime FZ N/Ph <100> 1 5 279 25 As cut 1 Flat None <10 <25 <40 / 20
L14183 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 As cut 2 Flats None / / / / 10
BF14023 100 0.3 None Prime FZ P/B <100> 1 5 250 25 As Lapped 2 Flats None <10 <30 <40 <15@0.3 50
L14181 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 SSP 2 Flats None <10 <30 <30 <15@0.3 5
L14181 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14168 100 0.3 None Prime FZ N/Ph <100> 1 5 275 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
L14178 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <20@0.2 0
L14178 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <20@0.2 296
BU14006 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <20@0.2 0
L14241 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <40 <10@0.3 0
L14196 100 0.3 None Prime FZ N/Ph <111> 1 5 280 20 DSP 2 Flats None <10 <30 <40 <10@0.3 64
L14182 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14177 100 0.3 None Prime FZ N/Ph <100> 1 5 285 15 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14052 100 0.3 None Prime FZ N/Ph <100> 1 10 250 15 SSP 1 Flat None <5 <30 <30 <20@0.2 0
L14205 100 0.3 None Prime FZ P/B <100> 1 5 250 25 SSP 2 Flats None <10 <30 <30 <10@0.3 50
L14204 100 0.3 None Prime FZ P/B <100> 1 5 250 25 DSP 2 Flats None <10 <30 <40 <10@0.3 0
L14206 100 0.3 None Prime FZ P/B <100> 1 5 275 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14206 100 0.3 None Prime FZ P/B <100> 1 5 275 25 DSP 2 Flats None <10 <30 <30 <10@0.3 44
L14244 100 0.3 None Prime FZ P/B <111> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <10@0.3 50
L14180 100 0.3 None Prime FZ P/B <100> 1 5 285 15 DSP 2 Flats None <10 <30 <30 <15@0.3 5
L14184 100 0.3 None Prime FZ P/B <100> 1 5 280 20 As cut 2 Flats None / / / / 10
L14115 100 0.3 None Prime FZ N/Ph <100> 7 10 250 15 SSP 1 Flat None <5 <30 <30 <20@0.2 150
E14009 100 0.5 None Prime FZ P/B <100> > 100 525 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14218 100 0.3 None Prime FZ un-
doped
<100> > 100 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14218 100 0.3 None Prime FZ un-
doped
<100> > 100 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 103
L14032 100 0.3 None Prime FZ P/B <100> 100 250 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
I14006 100 0.5 None Prime FZ N/Ph <111> 1000 2000 355 15 DSP 1 Flat None <10 <30 <30 <15@0.3 0
L14172 100 0.3 None Prime FZ P/B <100> 140 360 525 25 SSP 1 Flat None <5 <30 <30 <20@0.2 9
L14276 100 0.3 None Prime FZ N/Ph <100> 2500 5.500 200 20 DSP 2 Flats None <5 <30 <30 <15@0.3 159
L14212 100 0.3 None Prime FZ N/Ph <100> > 3.000 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 7
L14197 100 0.3 None Prime FZ N/Ph <111> > 3.000 525 20 SSP 1 Flat None <10 <30 <30 <10@0.3 0
BB14004 100 0.5 None Prime FZ N/Ph <100> > 5.000 200 20 DSP 1 Flat None <5 <30 <30 <10@0.5 0
BB14005 100 0.5 None Prime FZ N/Ph <100> > 5.000 300 20 DSP 1 Flat None <5 <30 <30 <10@0.3 0
L14056 100 0.3 None Prime FZ P/B <100> > 5.000 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14264 100 0.3 None Prime FZ N/Ph <100> > 5.000 300 20 SSP 2 Flats None <5 <30 <30 <10@0.3 135
L14230 100 0.3 None Prime FZ P/B <100> > 5.000 525 20 SSP 1 Flat None <5 <30 <40 <10@0.3 60
L14078 100 0.3 None Prime FZ N/Ph <100> > 10.000 380 20 DSP 2 Flats None <5 <30 <30 <10@0.3 15
L14031 100 0.3 None Prime FZ N/Ph <100> > 10.000 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14036 100 0.3 None Prime FZ N/Ph <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14035 100 0.3 None Prime FZ N/Ph <111> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14175 100 0.3 None Prime FZ N/Ph <111> > 10.000 300 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14114 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 SSP 1 Flat None <5 <30 <40 <10@0.3 47
L14018 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14018 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 125
L14202 100 0.3 None Prime FZ P/B <100> > 10.000 300 20 DSP 2 Flats None <10 <30 <30 <10@0.3 24
L14086 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14086 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 24
BF14039 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <15@0.3 50
BF14003 100 0.3 None Prime FZ Intrinsic <100> > 10.000 1000 25 DSP 1 Flat None <10 <30 <30 <15@0.3 17
L14087 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 SSP 2 Flats None <10 <30 <30 <10@0.3 0
125 mm
E15006 125 0.3 LTO on
back
Test CZ N/Sb <100> 0,01 0,03 375 20 SSP 1 Flat on
Front
<10 <30 <30 <10@0.5 0
L15002 125 0.5 None Prime CZ P/B <100> 10 20 525 25 SSP 2 Flats None <10 <30 <30 <20@0.3 0
L15001 125 0.3 None Coin Rolled FZ N/Ph <111> 130 150 600 10 lapped None None <5 / / / 29
L15008 125 0.5 None Test CZ P/B <100> > 1 625 15 SSP 2 Flats None <10 <35 <35 <15@0.3 0
L15007 125 0.3 None Prime CZ P/B <100> 1 30 625 15 SSP 2 Flats None <5 <30 <30 <15@0.3 0
150 mm (Test/Monitor)
L16084 150 0.3 None Test CZ P/B <100> 1 30 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 0
L16060 150 0.3 None Test CZ P/B <100> 1 50 675 25 SSP 1 Flat None <10 <40 <40 <30@0.3 0
BO16003 150 0.3 None Test CZ N/Ph <100> 4 7 625 20 SSP 1 Flat None <5 <30 <30 <10@0.2 0
E16015 150 0.3 None Test CZ P/B <100> 5 30 675 25 SSP 1 Flat None <3 <30 <30 <30@0.3 0
W16026 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16027 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat front <10 <30 <30 <20@0.3 0
W16028 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat back <10 <30 <30 <20@0.3 0
E16041 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
E16041 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
BM16003 150 0.3 None Mechanical CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
Z16069 150 0.3 Resist Mechanical CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 44
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 1.718
W16003 150 0.3 None Monitor CZ P/B <100> 5 30 650 25 SSP 1 Flat any <10 <30 <30 <50@0.16 100
W16008 150 0.3 None Test CZ P/B <100> 5 30 675 25 SSP 1 Flat None <25 <30 <30 <20@0.3 0
W16019 150 0.3 None Test CZ P/B <100> 10 20 650 25 SSP 1 Flat None <20 <30 <30 <20@0.3 0
W16017 150 0.3 None Test CZ P/B <100> 10 20 675 25 SSP 1 Flat None <25 <30 <30 <20@0.3 0
150 mm (Dummy/Reclaim)                                     0
W16002 150 0.3 None Reclaim CZ P/B <100> 1 100 >580   SSP 1 Flat None <20 <40 <60 <30@0.2 0
BO16002 150 0.3 None Dummy CZ N/Ph <100> 4 7 625 20 SSP 1 Flat None <5 <30 <30 / 0
W16009 150 0.3 None Dummy CZ P/B <100> 5 30 675 25 SSP 1 Flat None <25 <30 <30 SEMI cleaned 0
W16020 150 0.3 None Dummy CZ P/B any 10 20 650 25 SSP 1 Flat None / / / / 0
W16016 150 0.3 None Dummy CZ P/B any 10 20 675 25 SSP 1 Flat None / / / / 0
W16016 150 0.3 None Dummy CZ P/B any 10 20 675 25 SSP 1 Flat None / / / / 0
150 mm (CZ)
A16008 150 0.3 None Prime CZ P/B <100> < 0,005 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
A16008 150 0.3 None Prime CZ P/B <100> < 0,005 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
A16007 150 0.3 None Prime CZ N/As <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
BO16014 150 0.3 None Prime CZ P/B <100> < 0,005 300 15 DSP 1 Flat None <5 <30 <40 <20@0.3 149
(139)
L16155 150 0.3 None Prime CZ P/B <100> < 0,005 525 10 SSP 1 Flat None <5 <30 <30 <20@0.3 4
L16134 150 0.3 None Prime CZ P/B <100> < 0,005 675 20 SSP 1 Flat None <10 <30 <30 <20@0.3 25
BO16006 150 0.3 None Prime CZ P/B <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <30@0.2 267
L16133 150 0.3 None Prime CZ N/As <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
Z16075 150 0.3 100nm
dry SiO2
Prime CZ P/B <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <30@0.2 0
BO16008 150 0.3 None Prime CZ N/As <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 126
E16009 150 0.3 200-600
nm LTO
Prime CZ P/B <100> 0,01 0,02 625 25 SSP 1 Flat Yes <5 <30 <30 <20@0.3 0
L16056 150 0.3 None Prime CZ P/B <100> 0,01 0,02 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16018 150 0.3 None Prime CZ P/B <100> 0,01 0,02 675 20 DSP 1 Flat None <5 <30 <40 <30@0.2 0
L16062 150 0.3 None Prime CZ P/B <100> 0,01 0,02 675 15 DSP 1 Flat None <5 <35 <40 <15@0.2 0
L16141 150 0.3 None Prime CZ P/B <100> 0,01 0,05 300 7 DSP 1 Flat None <5 <30 <30 <20@0.3 19
L16062 150 0.2 None Prime CZ P/B <100> 0,01 0,02 675 15 DSP 1 Flat Yes <5 <30 <40 <20@0.3 0
L16183 150 0.2 None Prime CZ P/B <100> 0,01 0,02 350 10 DSP 1 Flat None <5 <30 <40 <15@0.2 25
L16056 150 0.3 None Prime CZ P/B <100> 0,01 0,02 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16010 150 0.3 None Prime CZ P/B <100> 0,1 20 625 25 DSP 1 Flat None <10 <30 <30 <30@0.3 0
L16008 150 0.5 None Prime CZ P/B <100> > 1 595 10 SSP 1 Flat None <10 <30 <30 <25@0.3 0
L16008 150 0.5 None Prime CZ P/B <100> > 1 595 10 SSP 1 Flat None <10 <30 <30 <20@0.3 0
E16027 150 0.5 None Prime CZ P/B <100> > 1 625 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
L16107 150 0.2 None Prime CZ P/B <100> > 1 1000 15 DSP None None <3 <20 <25 <20@0.3 0
W16012 150 0.3 None Prime CZ P/B <100> 1 5 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
AJ16001 150 0.3 None Prime CZ P/B <100> 1 5 675 25 SSP 1 Flat None <7 <20 <30 <20@0.3 0
W16013 150 0.3 None Prime CZ P/B <100> 1 5 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16032 150 0.3 None Prime CZ P/B <100> 1 20 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16033 150 0.3 None Prime CZ P/B <100> 1 30 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16147 150 0.3 None Prime CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 0
L16147 150 0.3 None Prime CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 541
Z16071 150 0.3 200 nm
wet SiO2
Prime CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 25
Z16040 150 0.3 2400 nm
wet SiO2
Prime CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 4
L16139 150 0.3 None Prime CZ P/B <100> 1 10 300 20 DSP 1 Flat None <5 <30 <30 <20@0.3 50
L16138 150 0.3 None Prime CZ P/B <100> 1 10 650 25 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16012 150 0.3 None Prime CZ P/B <100> 1 10 650 25 DSP Notch None <5 <30 <30 <20@0.3 0
L16173 150 0.3 None Prime CZ P/B <100> 1 20 525 20 SSP Notch None <10 <30 <30 <20@0.3 50
W16004 150 0.3 None Prime CZ P/B <100> 1 30 625 25 SSP JEIDA None <10 <20 <30 <20@0.3 25
L16072 150 0.3 None Prime CZ P/B <100> 1 30 300 20 SSP 1 Flat None <5 <40 <40 <20@0.3 50
L16088 150 0.3 None Prime CZ P/B <100> 1 30 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 0
L16109 150 0.3 None Prime CZ N/Ph <100> 1 30 450 20 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16110 150 0.3 None Prime CZ N/Ph <100> 1 30 550 20 SSP 1 Flat None <10 <30 <30 <20@0.3 0
Z16033 150 0.3 300 nm
dry SiO2
Prime CZ P/B <100> 1 30 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 2
Z16022 150 0.3 1000nm
wet SiO2
Prime CZ P/B <100> 1 30 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 0
L16043 150 0.3 None Prime CZ N/Ph <100> 1 30 1000 20 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16012 150 0.3 None Prime CZ P/B <100> 1 30 650 25 DSP Notch None <10 <30 <30 <20@0.3 0
L16059 150 0.3 None Prime CZ P/B <100> 1 30 450 20 DSP 1 Flat None <10 <30 <30 <20@0.3 0
L16012 150 0.3 None Prime CZ P/B <100> 1 30 650 25 DSP Notch None <10 <30 <30 <20@0.3 0
E16019 150 0.3 None Prime CZ P/B <100> 1 50 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16017 150 0.3 None Prime CZ P/B <100> 1 50 625 50 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16021 150 0.3 None Prime CZ P/B <100> 1 50 675 25 SSP 1 Flat None <10 <30 <40 <25@0.3 0
E16022 150 0.3 None Prime CZ P/B <100> 1 50 650 50 SSP 1 Flat None <10 <30 <40 <25@0.3 0
L16053 150 0.3 None Prime CZ P/B <100> 1 50 600 10 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16154 150 0.3 None Prime CZ P/B <100> 1 100 675 25 SSP None None <5 <30 <30 <20@0.3 0
BO16021 150 0.3 None Prime CZ P/B <100> 1 30 650 25 DSP Notch None <10 <30 <30 <20@0.3 200
L16154 150 0.3 None Prime CZ P/B <100> 1 100 675 25 SSP None None <5 <30 <30 <20@0.3 25
W16021 150 0.3 None Prime CZ P/B <100> 2,1 2,1 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16022 150 0.3 None Prime CZ P/B <100> 2,1 2,1 650 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16037 150 0.3 None Prime CZ N/Ph <100> 2 4 500 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16045 150 0.3 None Prime CZ P/B <100> 3 6 525 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16028 150 0.3 None Prime CZ P/B <100> 3 9 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16029 150 0.3 None Prime CZ P/B <100> 3 9 625 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16031 150 0.3 None Prime CZ P/B <100> 5 10 625 20 SSP JEIDA None <2 <10 <20 <20@0.3 0
L16092 150 0.3 None Prime CZ P/B <100> 5 10 525 25 SSP None None <5 <40 <50 <20@0.3 0
L16145 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16145 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16145 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 3.850
Z16077 150 0.3 1000 nm
wet SiO2
Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 25
Z16076 150 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16145 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16145 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16179 150 0.3 None Prime CZ P/B <100> 1 100 625 20 SSP 1 Flat None <5 <30 <30 <20@0.3 252
BO16001 150 0.3 None Prime CZ N/Ph <100> 4 7 625 20 SSP 1 Flat None <5 <30 <30 <20@0.2 0
L16092 150 0.3 None Prime CZ P/B <100> 5 10 525 25 SSP None None <5 <40 <50 <20@0.3 0
W16005 150 0.3 None Prime CZ P/B <100> 5 30 675 25 SSP 1 Flat Yes <5 <30 <30 <20@0.3 0
W16006 150 0.3 None Prime CZ P/B <100> 5 30 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
W16007 150 0.3 None Prime CZ P/B <100> 5 30 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
AR16010 150 0.3 None Prime CZ P/B <100> 5 10 675 15 SSP 1 Flat None ≤2 ≤20 ≤20 <30@0.2 825
AR16010 150 0.3 None Prime CZ P/B <100> 5 10 675 15 SSP 1 Flat None 2 ≤20 ≤20 <30@0.2 0
W16024 150 0.3 None Prime CZ P/B <100> 5 30 625 50 SSP 1 Flat any <10 <30 <40 <20@0.2 25
L16017 150 0.3 None Prime CZ P/B <100> 5 30 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16014 150 0.3 None Prime CZ P/B <100> > 5 675 25 SSP 1 Flat None <5 <40 <50 <20@0.3 0
L16014 150 0.3 None Prime CZ P/B <100> > 5 675 25 SSP 1 Flat None <5 <40 <50 <20@0.3 0
S16001 150 0.3 SEMI
Front
Prime CZ P/B <100> 8 12 675 20 SSP 1 Flat yes <5 <30 <30 <25@0.3 0
E16018 150 0.3 None Prime CZ P/B <100> 8 12 675 25 SSP 1 Flat Yes <5 <30 <30 <20@0.3 0
L16058 150 0.3 None Prime CZ P/B <100> > 10 380 10 DSP 1 Flat None <5 <30 <30 <20@0.3 42
K16020 150 0.3 100nm
SiO2
Prime CZ P/B <111>
4 OFF
10 15 625 15 SSP 1 Flat None <10 <30 <30 <25@0.3 0
K16004 150 0.3 100nm
SiO2
Prime CZ P/B <111>
4 OFF
10 20 625 15 SSP 1 Flat None <10 <40 <50 <25@0.3 0
L16042 150 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
W16018 150 0.3 None Prime CZ P/B <100> 10 20 650 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16011 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16011 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16014 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
W16014 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
W16015 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <15 <30 <30 <20@0.3 0
W16015 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <15 <30 <30 <20@0.3 0
L16070 150 0.3 None Prime CZ P/B <100> 10 20 705 5 etched 1 Flat None <5 <30 <30 / 0
L16033 150 0.3 None Prime CZ N/Ph <100> 10 20 275 25 DSP 1 Flat None <10 <30 <30 <20@0.3 0
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16058 150 0.3 None Prime CZ P/B <100> > 10 380 10 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16140 150 0.3 None Prime CZ P/B <100> 10 20 400 7 DSP 1 Flat None <5 <30 <30 <20@0.3 0
BO16009 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
BO16009 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 300
BO16013 150 0.3 None Prime CZ P/B <100> 10 20 625 10 DSP 1 Flat None <5 <30 <30 <20@0.3 42
AH16003 150 0.3 600nm
PECVD SiN
Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 100
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 13
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
BO16011 150 0.3 None Prime CZ N/Ph <100> 10 20 675 20 SSP 1 Flat None <10 <30 <30 <20@0.3 430
L16100 150 0.3 None Prime CZ N/Ph <100> 10 20 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16013 150 0.2 None Prime CZ P/B <100> 10 20 380 5 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16011 150 0.3 None Prime CZ N/Ph <100> 10 20 380 10 DSP 1 Flat None <5 <30 <30 <10@0.3 0
L16019 150 0.3 None Prime CZ P/B <100> 10 50 340 10 DSP 1 Flat None <10 <40 <40 <25@0.2 0
E16012 150 0.3 None Prime CZ P/B <100> 11 25 675 25 SSP 1 Flat None <10 <40 <40 <20@0.3 0
E16020 150 0.3 None Prime CZ P/B <100> 12 18 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
AJ16002 150 0.3 None Prime CZ P/B <100> 15 25 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
E16030 150 0.3 None Prime CZ P/B <100> 15 25 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16030 150 0.3 None Prime CZ P/B <100> 15 25 625 20 DSP 1 Flat None <5 <30 <30 <20@0.3 0
L16001 150 0.3 None Prime CZ P/B <100> 15 25 675 20 DSP 1 Flat None <10 <30 <30 <20@0.3 0
E16008 150 0.3 None Prime CZ P/B <100> 20 30 625 25 SSP 1 Flat None <6 <30 <20 <30@0.2 0
E16005 150 0.3 None Prime CZ P/B <100> 25 45 650 50 SSP 1 Flat None <5 <30 <30 <30@0.3 0
E16004 150 0.3 None Prime CZ P/B <100> 25 45 675 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
L16019 150 0.3 None Prime CZ P/B <100> 10 50 340 10 DSP 1 Flat None <10 <40 <40 <25@0.2 0
E16023 150 0.3 None Prime CZ P/B <100> 15 25 625 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16034 150 0.3 None Prime CZ P/B <100> 10 20 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
AR16002 150 0.3 None Prime CZ P/B <100> 15 22 675 15 SSP 1 Flat Yes ≤2 <30 ≤20 <30@0.2 8
AR16005 150 0.3 None Prime CZ P/B <100> 15 22 675 15 SSP 1 Flat None 2 <30 20 <30@0.2 0
E16024 150 0.3 None Prime CZ P/B <100> 15 25 675 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
AR16007 150 0.3 None Prime CZ P/B <100> 15 25 675 15 SSP 1 Flat Yes ≤2 ≤20 ≤20 <30@0.2 0
AR16008 150 0.2 None Prime CZ P/B <100> 15 25 675 15 SSP 1 Flat None 2 ≤20 ≤20 <30@0.2 0
AR16009 150 0.3 None Prime CZ P/B <100> 15 25 675 15 SSP 1 Flat Yes ≤2 ≤20 ≤20 <30@0.2 4
L16143 150 0.3 None Prime CZ P/B <100> 15 25 675 20 DSP 1 Flat None <5 <30 <40 <20@0.3 0
BO16020 150 0.3 None Prime CZ P/B <100> 15 25 675 20 DSP 1 Flat None <5 <30 <40 <20@0.3 450
L16161 150 0.2 None Prime CZ P/B <100> 15 25 380 10 DSP 1 Flat None <5 <20 <25 <30@0.2 0
L16157 150 0.3 None Prime CZ P/B <100> 17 23 675 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16016 150 0.2 None Prime CZ P/B <100> 40 100 525 25 DSP 1 Flat Yes <5 <40 <30 <20@0.3 0
BO16018 150 0.3 None Prime CZ P/B <100> 95 105 625 20 SSP 1 Flat None <10 <30 <30 <20@0.3 170
150 mm (FZ)
L16023 150 0.3 None Prime FZ P/B <100> > 1.000 625 25 DSP 1 Flat None <5 <30 <30 <30@0.2 0
L16128 150 0.3 None Prime FZ N/Ph <100> > 3.000 200 10 DSP 1 Flat None <10 <40 <40 SEMI
cleaned
52
L16105 150 0.3 None Prime FZ P/B <100> > 3.000 350 20 SSP 2 Flats None <10 <30 <30 <20@0.3 23
Z16018 150 0.3 300 nm
dry SiO2
Prime FZ P/B <100> > 3.000 350 20 SSP 2 Flats None <10 <30 <30 <20@0.3 5
L16114 150 0.3 None Prime FZ P/B <100> > 3.000 350 20 SSP 1 Flat None <10 <30 <30 <20@0.3 20
L16103 150 0.3 None Prime FZ P/B <100> > 3.000 675 20 DSP 2 Flats None <10 <30 <30 <20@0.3 2
L16113 150 0.3 None Prime FZ P/B <100> > 3.000 675 20 DSP 1 Flat None <10 <30 <30 <20@0.3 60
L16009 150 0.3 None Prime FZ N/Ph <111> > 3.000 285 7 DSP 1 Flat None <5 <30 <35 <20@0.3 12
L16007 150 0.3 None Prime FZ N/Ph <100> > 3.500 750 25 SSP 1 Flat None <5 <30 <30 <20@0.3 0
L16015 150 0.3 None Prime FZ N/Ph <100> > 3.500 725 25 SSP 1 Flat None <5 <30 <30 <20@0.3 16
H16003 150 0.2 None Prime FZ P/B <100> 3.000 7.000 675 10 SSP 1 Flat None <3 <10 <15 <10@0.3 10
L16020 150 0.3 None Test FZ N/Ph <111> > 5.000 470 15 SSP 1 Flat None <10 <30 <30 <30@0.3 0
L16022 150 0.3 None Prime FZ N/Ph <111> > 5.000 470 15 SSP 1 Flat None <10 <30 <30 <20@0.3 0
L16025 150 0.3 None Prime FZ P/B <100> > 10.000 300 25 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16027 150 0.3 None Prime FZ N/Ph <100> > 10.000 300 25 SSP 1 Flat None <10 <40 <40 <20@0.3 0
L16136 150 0.3 None Prime FZ P/B <100> > 10.000 675 20 DSP 1 Flat None <5 <30 <40 <20@0.3 61
L16117 150 0.3 None Prime FZ P/B <100> > 10.000 675 20 DSP 1 Flat Yes <5 <30 <40 <20@0.3 8
L16137 150 0.3 None Prime FZ P/B <100> > 10.000 675 20 SSP 1 Flat None <5 <30 <40 <20@0.3 79
200 mm
AJ18005 200 0.2 None Prime CZ N/Sb <100> 0,01 0,02 725 20 SSP Notch None <5 <30 <40 <20@0.2 0
W18016 200 0.5 None Dummy CZ any <100> 0 100 > 600 SSP Notch / / / / / 0
E18020 200 0.5 None Prime CZ P/B <100> 0,5 100 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
W18003 200 0.5 None Prime CZ P/B <100> 0,5 100 725 25 SSP Notch None or any <3 <40 <40 <30@0.2 0
E18020 200 0.5 None Prime CZ P/B <100> 0,5 100 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
W18005 200 0.5 None Prime CZ P/B <100> 0,5 100 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
AJ18007 200 0.3 None Prime CZ P/B <100> < 0,02 725 25 SSP Notch None <10 <40 <40 <30@0.2 150
AJ18010 200 0.3 None Prime CZ P/B <100> 0,008 0,02 725 25 DSP Notch None <10 <40 <40 <30@0.2 70
W18020 200 0.5 None Dummy CZ   <100>     > 600 SSP Notch None or any / / / / 0
W18020 200 0.5 None Dummy CZ   <100>     > 600 SSP Notch None or any / / / / 0
W18005 200 0.5 None Prime CZ P/B <100> 0,5 100 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
AJ18011 200 0.3 Dummy Prime CZ P/B <100> 0,008 0,02 725 25 DSP Notch None <10 <40 <40 <30@0.2 0
BM18001 200 0.5 None Prime CZ N/Ph <100> > 1 130 7 DSP Notch None <10 / / SEMI
cleaned
15
E18026 200 0.5 None Prime CZ N/Ph <100> > 1 150 10 DSP Notch None <10 / / SEMI
cleaned
0
L18057 200 0.3 None Prime CZ P/B <100> 1 50 340 20 DSP Notch None <10 <40 <40 <25@0.3 12
L18047 200 0.3 None Prime CZ P/B <100> > 1 440 15 DSP Notch None <5 <40 <40 <20@0.3 24
L18041 200 0.3 None Prime CZ P/B <100> > 1 1000 15 DSP Notch None <3 <40 <40 <20@0.3 0
E18002 200 0.5 None Prime CZ P/B <100> 1 20 725 25 SSP Notch None <10       0
AJ18003 200 0.2 None Prime CZ P/B <100> 1 20 720 20 DSP Notch None <2 <30 <30 <20@0.2 0
W18013 200 0.5 None Prime
(Excess)
CZ P/B <100> 1 30 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
L18060 200 0.3 None Prime CZ N/Ph <100> 1 10 725 25 SSP Notch None <10 <40 <40 <50@0.2 15
W18018 200 0.5 None Prime
(Excess)
CZ P/B <100> 1 30 725 25 SSP Notch None <10 <40 <40 <30@0.2 7
AR18004 200 0.3 None Prime CZ P/B <100> 1 30 725 25 SSP Notch None <5 <40 <40 <30@0.2 0
W18021 200 0.5 None Prime
(Excess)
CZ N/Ph <100> 1 30 725 25 SSP Notch None or any <10 <40 <40 <30@0.2 0
Z18005 200 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 1 30 725 25 SSP Notch None <5 <40 <40 <30@0.2 0
L18021 200 0.2 None Test CZ P/B <100> 1 65 1000 50 SSP Notch Yes <10 <40 <30 <30@0.2 0
AR18005 200 0.3 None Prime CZ P/B <100> 1 30 725 25 SSP Notch Yes <5 <50 <50 <50@0.16 600
BM18008 200 0.2 None Prime CZ P/B <100> 1 30 725 25 SSP Notch None <10 <40 <40 <20@0.2 0
L18042 200 0.3 None Prime CZ P/B <100> 1 50 725 25 SSP Notch Yes <10 <40 <40 <30@0.2 10
BM18009 200 0.2 None Prime
(Excess)
CZ P/B <100> 1 100 725 25 SSP None or any None <10 <40 <40 <20@0.2 0
BM18009 200 0.2 None Prime
(Excess)
CZ P/B <100> 1 100 725 25 SSP None or any None <10 <40 <40 <20@0.2 0
BM18013 200 0.2 None Prime
(Excess)
CZ P/B <100> 1 100 725 25 SSP Flat None <10 <40 <40 <20@0.2 1.125
BM18012 200 0.2 None Prime
(Excess)
CZ P/B <100> 1 100 725 25 SSP Notch any <10 <40 <40 <30@0.2 1.850
BM18006 200 0.2 None Monitor CZ P/B <100> 1 50 725 25 SSP Notch Yes <10 <40 <40 <20@0.2 0
AR18007 200 0.3 None Prime CZ P/B <100> 1 100 725 25 SSP Notch None <2.5 <30 <30 <30@0.2 12
AR18009 200 0.3 None Prime CZ P/B <100> 1 100 725 25 SSP Notch None <2.5 <30 <30 <30@0.2 80
L18037 200 0.3 None Prime CZ P/B <100> 1 100 725 25 SSP Notch None <10 <40 <40 <20@0.3 0
L18059 200 0.3 None Prime CZ P/B <100> 1 100 725 25 SSP Notch None <10 <30 <50 <20@0.3 594
L18037 200 0.3 None Prime CZ P/B <100> 1 100 725 25 SSP Notch None <10 <40 <40 <20@0.3 363
BM18002 200 0.3 None Monitor CZ P/B <100> 1 100 725 25 SSP Notch Yes <10 <40 <40 <20@0.2 0
BM18002 200 0.3 None Monitor CZ P/B <100> 1 100 725 25 SSP Notch Yes <10 <40 <40 <20@0.2 1.000
L18029 200 0.3 None Prime CZ P/B <100> 5 100 725 25 DSP Notch None <10 <50 <50 <10@0.3 0
X18009 200 0.5 100 nm
SiO2
Test CZ P/B <100> 1 100 725 50 SSP Notch / / / / / 157
X18011 200 0.5 SiO2
+Ti/Pt
Test CZ P/B <100> 6 80 > 650 SSP Notch / <10 / / / 25
X18010 200 0.5 None Test CZ P/B <100> 5 80 725 25 SSP Notch / <10 <50 <50 <20@0.3 0
L18029 200 0.3 None Prime CZ P/B <100> 5 100 725 25 DSP Notch None <10 <50 <50 <10@0.3 0
L18029 200 0.3 None Prime CZ P/B <100> 5 100 725 25 DSP Notch None <10 <50 <50 <10@0.3 217
BM18002 200 0.3 None Monitor CZ P/B <100> 1 100 725 25 SSP Notch Yes <10 <40 <40 <20@0.2 0
AR18010 200 0.3 None Prime CZ P/B <100> 10 20 725 25 SSP Notch None <5 <40 <40 <50@0.16 0
AR18010 200 0.3 None Prime CZ P/B <100> 10 20 725 25 SSP Notch None <5 <40 <40 <50@0.16 0
AR18010 200 0.3 None Prime CZ P/B <100> 10 20 725 25 SSP Notch None <5 <40 <40 <50@0.16 600
AR18003 200 0.2 None Prime CZ N/Ph <100> 1 100 725 15 SSP Notch Yes <2 <20 <20 <20@0.2 0
L18030 200 0.3 None Prime CZ P/B <100> 5 100 725 25 DSP Notch None <3 <30 <30 <30@0.2 0
W18009 200 0.2 None Prime CZ P/B <100> 5 30 725 25 SSP Notch None <8 <30 <50 <20@0.2 0
W18010 200 0.2 None Test CZ P/B <100> 5 30 725 25 SSP Notch None <10 <30 <50 <30@0.2 0
E18003 200 0.5 None Prime CZ P/B <100> 8 12 725 25 SSP Notch   <5 <30 <30 <20@0.3 0
AJ18002 200 0.2 None Prime CZ P/B <100> 8 25 725 25 SSP Notch None <5 <50 <50 <30@0.12 0
W18003 200 0.5 None Prime CZ P/B <100> 9 18 725 25 SSP Notch None <10 <30 <30 <50@0.12 0
E18007 200 0.5 None Prime CZ P/B <100> 10 15 725 25 SSP Notch None <10 <40 <40 <30@0.2 0
AJ18009 200 0.2 None Prime CZ P/B <100> 15 25 725 25 SSP Notch None <5 <30 <40 <30@0.12 100
AJ18012 200 0.2 None Prime
(Excess)
CZ P/B <100> 15 25 725 25 DSP Notch None <5 <30 <40 <30@0.2 25
E18006 200 0.5 None Prime CZ P/B <100> 15 25 725 25 SSP Notch None <10 <40 <40 <30@0.2 0
E18009 200 0.5 None Prime CZ P/B <100> 18 25 725 25 SSP Notch None <10 <40 <40 <30@0.2 0
E18008 200 0.5 None Prime CZ P/B <100> 38 63 725 25 SSP Notch None <10 <40 <40 <30@0.2 0
H18001 200 0.5 None Pime FZ P/B <100> 3.000 10.000 725 10 SSP Notch None <4 <10 <10 <30@0.3 0
300 mm
C112008 300 0.5 None Coin Rolled CZ P/B <100> < 0,01 775 25 DSP Notch None <20 <50 <50 / 0
E112002 300 0.3 None Prime CZ P/B <100> 0,5 100 775 25 DSP Notch None <10 <50 <50 <100@0.2 0
AJ112001 300 0.3 None Test CZ P/B <100> 0,5 100 775 25 DSP Notch None <10 <50 <50 <100@0.2 0
AJ112001 300 0.3 None Test CZ P/B <100> 0,5 100 775 25 DSP Notch Yes <10 <50 <50 <100@0.2 0
W112009 300 0.3 None Dummy CZ P/B <100> 1 100 775 25 DSP Notch Yes <10 <50 <50 SEMI
cleaned
0
X112002 300 0.5 None Test CZ / / / / 775 25 DSP / / / / / / 12
AJ112002 300 0.3 None Test CZ P/B <100> 1 100 775 25 DSP Notch Yes <10 <50 <50 <100@0.2 0
AJ112004 300 0.3 None Test CZ P/B <100> 1 100 775 25 DSP Notch Yes       <100@0.2 0
AJ112004 300 0.3 None Test CZ P/B <100> 1 100 775 25 DSP Notch Yes       <100@0.2 25
AJ112005 300 0.3 None Prime CZ P/B <100> 1 100 775 25 DSP Notch Yes       <150@0.05 0
AR112003 300 0.3 None Prime CZ P/B <100> 0 100 775 25 DSP Notch Yes <5 <50 <50 <50@0.2 600
AR112003 300 0.3 None Prime CZ P/B <100> 0 100 775 25 DSP Notch Yes <5 <50 <50 <50@0.2 0
AR112002 300 0.3 None Prime CZ P/B <100> 0 100 775 25 DSP Notch Yes <5 <50 <50 <50@0.2 23
E112010 300 0.5 None Prime CZ P/B <100> 1 100 775 25 DSP Notch None <20 <50 <50 / 0
                                       
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