Silicon Wafers                              
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Part-No. Diameter Coating Grade Growth Type/
Dopant
Orien
tation
Resistivity
[Ohm-cm]
Thickness Finish Flat / Notch Laser Mark TTV Bow Warp Particles Q'ty
  [mm] []           [from] [to] [m] []       [m] [m] [m] [m] [slices]
                                       
square
J10001 125x125 None   CZ P/B <100> 1 3 200 20 As Cut / None <=30   <=40 / 0
J10002 125x125 None   CZ P/B <100> 1 3 200 20 Etched / None <=30   <=40 / 0
X10001 10x4 None   CZ any <100> 1 50 525 25 SSP / None / / / / 0
X10002 10x10 None / FZ P/B <100> > 10.000 525 20 SSP / None / / / / 0
X10003 5x5 None / FZ P/B <100> > 10.000 525 20 SSP / None / / / / ~250
50.8 mm
A12098 50.8 0.3 None Prime CZ P/B <100> 0,001 0,002 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12003 50.8 0.3 None Prime CZ N/As <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12054 50.8 0.3 None Prime CZ P/B <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
N12001 50.8 0.3 None Prime CZ P/B <100> > 1 275 25 DSP 2 Flats None <10 <30 <30 <10@0.5 0
C12009 50.8 0.3 None Prime CZ P/B <100> > 1 60 10 DSP 2 Flats None <5 <30 <30 SEMI cleaned 0
N12002 50.8 0.3 None Prime CZ P/B <100> > 1 275 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
A12007 50.8 0.3 None Prime CZ P/B <100> 1 2 279 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A12008 50.8 0.3 None Prime CZ N/Ph <100> 1 3 279 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A12008 50.8 0.3 None Prime CZ N/As <100> < 0,005 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
A12151 50.8 0.3 None Prime CZ P/B <100> < 0,005 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
A12109 50.8 0.3 None Prime CZ N/Sb <100> 0,01 0,02 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
J12012 50.8 0.3 None Prime CZ P/B <100> 0,001 0,004 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 25
J12031 50.8 0.3 None Prime CZ P/B <100> 0,001 0,004 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 44
A12017 50.8 0.3 None Prime CZ P/B <100> 1 5 279 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12011 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
A12015 50.8 0.3 None Prime CZ N/Ph <100> 1 5 279 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
O12001 50.8 0.3 None Prime CZ P/B <110> 1 5 279 25 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12102 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12016 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12004 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A12033 50.8 0.3 None Prime CZ P/B <100> 1 10 381 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
B12001 50.8 0.3 None Prime CZ P/B <100> 1 10 200 25 DSP 1 Flat None <5 <30 <30 <15@0.2 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12011 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12011 50.8 0.3 None Prime CZ P/B <111>
ON
1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
A12152 50.8 0.3 None Prime CZ P/B <100> 1 5 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
J12011 50.8 0.3 None Prime CZ P/B <111> 1 5 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 20
J12021 50.8 0.3 None Prime CZ P/B <100> 1 5 279 15 DSP 1 Flat None <10 <30 <30 <10@0.5 122
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
A12021 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 424
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12007 50.8 0.3 None Prime CZ P/B <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 0
J12033 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <10@0.5 475
J12004 50.8 0.3 None Prime CZ N/Ph <100> 1 10 279 25 SSP 1 Flat None <10 <30 <30 <10@0.5 799
A12021 50.8 0.3 None Prime CZ P/B <100> 1 10 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12082 50.8 0.3 None Prime CZ P/B <111>
ON
1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12010 50.8 0.4 None Prime CZ N/Ph <111>
4 OFF
1 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12030 50.8 0.3 None Prime CZ P/B <111> ON 1 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12018 50.8 0.3 None Prime CZ N/Ph <111>
4 OFF
1 20 500 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12032 50.8 0.3 None Prime CZ P/B <111> ON 1 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
C12010 50.8 0.3 None Prime CZ P/B <100> 1 30 60 12 DSP 1 Flat None <10 <30 <30 SEMI cleaned 0
A12091 50.8 0.3 None Prime CZ P/B <100> 4 7 250 25 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12052 50.8 0.3 None Prime CZ P/B <111>
4 OFF
5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12031 50.8 0.3 None Prime CZ N/Ph <111> ON 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12020 50.8 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <10 <30 <30 <10@0.5 100
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12034 50.8 0.3 None Prime CZ P/B <100> 5 10 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
I12008 50.8 0.3 None Prime CZ P/B <110> 5 10 300 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12153 50.8 0.3 None Prime CZ P/B <100> 5 10 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
A12035 50.8 0.3 None Prime CZ P/B <100> 10 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 25
A12020 50.8 0.3 None Prime CZ N/Ph <100> 10 20 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12076 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12076 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A12154 50.8 0.3 None Prime CZ P/B <100> 10 20 279 20 SSP 1 Flat None <5 <30 <30 <15@0.3 100
J12023 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
J12023 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 379
BF12007 50.8 0.3 None Prime CZ un-
doped
<111> > 100 279 25 SSP 1 Flat None <10 <30 <30 <10@0.3 20
BB12005 50.8 0.2 None Prime FZ P/B <100> > 100 500 15 DSP 1 Flat None <10 <30 <30 <15@0.3 0
A12076 50.8 0.3 None Prime CZ un-
doped
<100> > 100 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
C12001 50.8 0.3 None Prime FZ N/Ph <100> 140 160 750 25 SSP 1 Flat None <10 <20 <20 <30@0.3 0
C12002 50.8 0.3 None Prime FZ N/Ph <100> 140 160 1000 25 SSP 1 Flat None <10 <20 <20 <30@0.3 0
D12001 50.8 0.3 None Prime FZ P/B <100> 100 500 500 25 DSP 2 Flats None <10 <30 <30 <30@0.5 0
D12002 50.8 0.3 None Prime FZ P/B <111> 2.000 4.000 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
BB12013 50.8 0.3 None Prime FZ N/Ph <100> > 1.000 300 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
I12010 50.8 0.3 None Prime FZ N/Ph <100> > 5.000 300 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
I12010 50.8 0.3 None Prime FZ N/Ph <100> > 5.000 300 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
BB12001 50.8 0.3 None Prime FZ in-
trinsic
<100> > 10.000 279 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
BB12006 50.8 0.3 None Prime FZ in-
trinsic
<100> > 10.000 279 25 DSP 2 Flats None <10 <30 <30 <10@0.5 20
J12029 50.8 0.3 None Prime FZ N/Ph <100> > 10.000 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 133
J12027 50.8 0.3 None Prime FZ P/B <100> > 10.000 279 25 SSP 1 Flat None <10 <30 <30 <15@0.3 112
76.2 mm
A13019 76.2 0.5 None Prime CZ P/B <100> < 0,005 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A13018 76.2 0.5 None Prime CZ N/As <100> < 0,005 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13031 76.2 0.5 None Prime CZ P/B <100> 0,01 0,02 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 50
J13014 76.2 0.3 None Prime CZ P/B <100> 1 3 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13009 76.2 0.5 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 100
A13010 76.2 0.5 None Prime CZ N/Ph <100> 1 5 381 20 SSP 2 Flas None <5 <15 <15 <15@0.3 0
J13041 76.2 0.3 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L13010 76.2 0.3 None Prime CZ P/B <100> 1 5 381 20 SSP 2 Flats None <5 <30 <30 <10@0.3 25
J13045 76.2 0.3 None Test CZ P/B <100>
2.5 OFF
1 30 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
Z13008 76.2 0.3 3150 nm
wet SiO2
Prime CZ P/B <100>
2.5 OFF
1 30 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 60
A13020 76.2 0.5 None Prime CZ P/B <100> 1 10 381 50 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A13020 76.2 0.5 None Prime CZ P/B <100> 1 10 381 50 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A13020 76.2 0.5 None Prime CZ P/B <100> 1 10 381 50 SSP 2 Flats None <5 <30 <30 <15@0.3 0
M13001 76.2 0.5 None Prime CZ P/B <100> 1 20 381 25 DSP 2Flats None <5 <30 <30 <10@0.5 0
P13001 76.2 0.3 None Prime CZ P/B <100> 1 20 381 15 SSP 2 Flats None <5 <10 <20 <30@0.2 0
P13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 15 SSP 1 Flat None <5 <20 <20 <15@0.3 0
J13001 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
J13001 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
J13006 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 1.023
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 0
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 0
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <20@0.2 396
J13002 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
Z13013 76.2 0.3 1000 nm
wet SiO2
Prime CZ N/Ph <100> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 50
J13043 76.2 0.3 None Prime CZ N/Ph <111> 1 10 381 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
J13011 76.2 0.3 None Prime CZ N/Ph <100> 1 10 1000 20 SSP 2 Flats None <8 <30 <30 <15@0.3 0
A13021 76.2 0.3 None Prime CZ N/Ph <100> 1 10 1000 20 SSP 1 Flat None <5 <30 <30 <15@0.3 0
J13053 76.2 0.3 None Prime CZ N/Ph <100> 1 10 400 20 SSP 2 Flats None <5 <30 <30 <15@0.3 24
L13011 76.2 0.3 None Prime CZ P/B <100> 1 10 280 20 SSP 2 Flats None <5 <30 <30 <15@0.3 125
J13022 76.2 0.3 None Prime CZ P/B <100> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 78
J13023 76.2 0.3 None Prime CZ N/Ph <100> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 158
J13025 76.2 0.3 None Test CZ P/B <100> 1 10 381 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
J13026 76.2 0.3 None Test CZ P/B <100> 1 10 381 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A13065 76.2 0.3 None Prime CZ P/B <100> 1 20 500 25 SSP 2 Flats None <5 <20 <20 <15@0.3 0
J13003 76.2 0.3 None Prime CZ P/B <100> 1 20 381 15 DSP 2 Flats None <5 <20 <20 <20@0.2 0
A13064 76.2 0.3 None Prime CZ P/B <100> 1 20 625 25 SSP 2 Flats None <5 <20 <20 <15@0.3 0
C13003 76.2 0.3 None Test CZ P/B <100> 2 10 375 25 SSP 2 Flats None <8 <30 <30 <20@0.2 0
J13031 76.2 0.3 None Prime CZ N/Ph <111> 1 10 381 20 DSP 2 Flats None <8 <30 <30 <15@0.3 50
J13013 76.2 0.3 None Prime CZ N/Ph <100> 2 20 270 10 DSP 2 Flats None <8 <30 <30 <15@0.3 49
A13008 76.2 0.5 None Prime CZ P/B <100> 5 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A13003 76.2 0.3 None Prime CZ P/B <100> 5 10 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13046 76.2 0.3 None Prime CZ P/B <100> 5 10 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 49
C13004 76.2 0.3 None Prime FZ P/B <100> 5 25 350 25 DSP 2 Flats None <5 <30 <30 <30@0.2 0
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 1.500
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J13005 76.2 0.3 None Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P13003 76.2 0.3 None Prime CZ P/B <100> 10 25 381 15 SSP 2 Flats None <5 <10 <20 <30@0.2 0
J13004 76.2 0.3 None Prime CZ P/B <100> 10 25 381 20 SSP 2 Flats Yes <5 <20 <20 <20@0.2 0
N13005 76.2 0.3 None Prime CZ N/Ph <111> 10   381 20 SSP 2 Flats None <10 <40 40 <10@0.5 0
A13007 76.2 0.5 None Prime CZ P/B <100> 10 20 381 40 SSP 2 Flats None <8 <30 <30 <15@0.3 0
A13007 76.2 0.5 None Prime CZ P/B <100> 10 20 381 40 SSP 2 Flats None <8 <30 <30 <15@0.3 0
Z13004 76.2 0.3 150 nm
dry SiO2
Prime CZ P/B <100> 10 20 381 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
N13003 76.2 0.3 None Prime CZ N/Ph <100> 1 100 1000 25 DSP 2 Flats None <10 <30 <30 <10@0.5 0
D13011 76.2 0.5 None Prime FZ N/Ph <111> > 1.000 381 20 DSP 2 Flats None <10 <25 <25 <15@0.3 0
L13006 76.2 0.3 None Prime FZ N/Ph <111> > 1.000 381 25 DSP 1 Flat None <10 <30 <30 <15@0.3 75
D13005 76.2 0.5 None Prime FZ N/Ph <111> > 5.000 355 20 SSP 2 Flats None <10 <30 <30 <15@0.5 0
BU13003 76.2 0.3 None Prime FZ Intrinsic <100> > 10.000 500 25 SSP 2 Flats None <10 <30 <30 <15@0.3 25
BF13001 76.2 0.5 None Prime FZ Intrinsic <100> > 10.000 381 25 DSP 2 Flats None <10 <25 <30 <15@0.3 63
100 mm (Test)
L14095 100 0.3 None Test CZ P/B <100> any any 420 25 SSP 2 Flats None any any any <10@0.3 0
L14098 100 0.3 None Test CZ N/Ph <100> any any 380 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14096 100 0.3 None Test CZ P/B <100> any any 512 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14093 100 0.3 None Test CZ P/B <100> any any 525 25 SSP 2 Flats None any any any <10@0.3 0
L14094 100 0.3 None Test CZ N/Ph <100> any any 525 25 SSP 2 Flats None any any any <10@0.3 0
L14103 100 0.3 None Test CZ P/B <100> 0,1 100 525 25 SSP 2 Flats Yes <10 <30 <30 <10@0.3 0
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14217 100 0.3 None Test CZ P/B <100> 0 100 525 25 SSP 2 Flats None <15 <35 <35 <15@0.3 0
BO14003 100 0.3 None Test CZ N/Ph <100> 0,8 1,2 525 20 SSP 2 Flats None <5 <30 <30 <20@0.3 0
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 0
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 0
BO14035 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 400
L14141 100 0.3 None Test CZ P/B <100> > 1 525 25 SSP 2 Flats None <10 <30 <40 <15@0.3 0
L14227 100 0.3 None Test CZ P/B <100> 0 100 525 25 SSP 1 Flat None <10 <40 <40 <10@0.3 0
L14117 100 0.3 None Test CZ P/B <100> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14118 100 0.3 None Test CZ P/B <100> 1 30 525 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14119 100 0.3 None Test CZ P/B <100> 1 30 275 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14120 100 0.3 None Test CZ N/Ph <111> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14121 100 0.3 None Test CZ N/Ph <100> 1 30 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
L14122 100 0.3 None Test CZ N/As <100> < 1 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
A14017 100 0.5 None Test CZ P/B <111>
4 OFF
5 25 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14123 100 0.3 None Test FZ N/Ph <100> > 1000 380 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
100 mm (CZ)
A14035 100 0.5 None Prime CZ P/B <100> 0,001 0,002 525 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A14015 100 0.5 None Prime CZ P/B <100> 0,001 0,003 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
B14002 100 0.5 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <10 <30 <40 <15@0.3 0
B14003 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <8 <30 <40 <15@0.3 0
A14027 100 0.5 None Prime CZ N/As <100> < 0,005 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14105 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14023 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 378
A14027 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
BO14028 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <20@0.2 131
L14171 100 0.5 None Prime CZ N/As <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
A14034 100 0.5 None Dummy CZ n/a <100> < 0,005 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14011 100 0.5 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14022 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14002 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 650
Z14105 100 0.3 290nm
dry SiO2
Prime CZ P/B <100> 0,001 0,01 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 49
BO14027 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 225
E14018 100 0.3 1400nm
wet SiO2
Prime CZ P/B <100> < 0,005 152 5 DSP 2 Flats None <5     Jars 0
J14003 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
J14003 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14161 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
A14117 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
N14005 100 0.3 None Prime CZ P/B <100> < 0,005 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
A14238 100 0.5 None Prime CZ P/B <100> < 0,005 1000 25 SSP 1 Flat None <10 <30 <40 <15@0.3 0
L14026 100 0.3 None Prime CZ P/B <100> < 0,01 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14036 100 0.5 None Prime CZ P/B <100> < 0,01 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
N14004 100 0.5 None Prime CZ P/B <100> < 0,018 525 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
A14001 100 0.5 None Prime CZ P/B <100> 0,005 0,01 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14016 100 0.5 None Prime CZ N/Sb <100> 0,008 0,02 525 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
E14002 100 0.5 None Prime CZ N/Sb <100> 0,008 0,02 525 25 SSP 2 Flats Yes <5 <30 <30 <15@0.3 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14010 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
BO14010 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 309
Z14100 100 0.3 100 nm
dry SiO2
Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
L14023 100 0.3 None Prime CZ N/Sb <100> 0,008 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14030 100 0.5 None Prime CZ N/Sb <111>
4 OFF
0,008 0,02 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14019 100 0.5 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
E14008 100 0.5 None Prime CZ P/B <100> 0,01 0,02 525 10 SSP 2 Flats None <5 <20 <20 <10@0.3 0
L14019 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14019 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14019 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
J14005 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
N14004 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <10 <30 <30 <10@0.5 0
L14019 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14013 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 0
BO14013 100 0.3 None Prime CZ P/B <100> 0,01 0,02 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 185
A14037 100 0.3 None Prime CZ P/B <100> 0,04 0,05 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 69
L14060 100 0.3 None Prime CZ P/B <100> 0,05 0,15 525 20 SSP 2 Flats Yes <5 <30 <30 <15@0.3 0
BO14044 100 0.3 None Prime CZ P/B <100> 0,05 0,2 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 175
A14023 100 0.5 None Prime CZ P/B <100> 0,1 0,25 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14002 100 0.5 None Prime CZ P/B <100> 0,2 0,4 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14164 100 0.2 None Prime CZ P/B <100> 0,1 0,5 525 20 SSP 2 Flats None <10 <20 <20 <15@0.3 0
A14022 100 0.5 None Prime CZ P/B <100> 0,1 1 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14019 100 0.5 None Prime CZ P/B <100> 0,2 1 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14020 100 0.5 None Prime CZ N/Ph <100> 0,2 1 525 25 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14009 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <5 <30 <30 <10@0.3 139
L14033 100 0.5 None Prime CZ P/B <100> 0,5 1 285 10 E/E 2 Flats None <5 <30 <30 / 0
L14034 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14035 100 0.5 None Prime CZ P/B <100> 0,5 1 250 10 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A14038 100 0.5 None Prime CZ P/B <100> 0,5 2 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14032 100 0.3 None Prime CZ P/B <100> 1 3 275 25 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14001 100 0.3 None Prime CZ N/Ph <100> 0,8 1,2 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
AX14043 100 0.3 None Prime CZ P/B <100>
19.5 OFF
0 100 525 25 SSP 2 Flats None <10 < 30 < 30 <20@0.2 1
L14250 100 0.3 None Prime CZ P/B <100> 1 3 410 10 As Cut 1 Flat None <5     / 20
L14249 100 0.3 None Prime CZ N/Ph <100> 1 3 410 10 As Cut None None <5     / 9
L14039 100 0.3 None Prime CZ N/Ph <100> 1 3 420 10 Etched 2 Flats None <5 <30 <30 / 189
L14148 100 0.3 None Prime CZ P/B <100> 1 3 525 20 SSP 2 Flats None <5 < 30 < 30 <15@0.3 21
L14145 100 0.3 None Prime CZ P/B <100> 1 3 275 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14145 100 0.3 None Prime CZ P/B <100> 1 3 275 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 11
BO14038 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 206
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14149 100 0.3 None Prime CZ P/B <111> 1 3 525 20 SSP 1 Flat None <5 <30 <30 <15@0.3 0
L14046 100 0.3 None Prime CZ N/Ph <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 172
L14149 100 0.3 None Prime CZ P/B <111> 1 3 525 20 SSP 1 Flat None <5 <30 <30 <15@0.3 147
L14153 100 0.3 None Prime CZ N/Ph <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14150 100 0.3 None Prime CZ N/Ph <100> 1 3 525 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14045 100 0.3 None Prime CZ P/B <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14046 100 0.3 None Prime CZ N/Ph <100> 1 5 275 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14003 100 0.5 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14003 100 0.5 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14003 100 0.5 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14029 100 0.5 None Prime CZ P/B <100> 1 3 525 15 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 1.845
A14060 100 0.5 None Test CZ P/B <100> 1 5 525 30 SSP 2 Flats None <10 <30 <30 <20@0.3 0
A14010 100 0.5 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P14009 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14004 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14018 100 0.3 None Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 34
Z14034 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 25
Z14101 100 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 48
Z14016 100 0.3 1500 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14016 100 0.3 1500 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 12
Z14053 100 0.3 300 nm
LPCVD SiN
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 4
Z14034 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14083 100 0.3 140 nm
wet SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14053 100 0.3 300 nm
LPCVD Nitride
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14035 100 0.3 100nm
dry SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14021 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14032 100 0.3 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 400
L14005 100 0.5 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.5 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
Z14049 100 0.3 250 nm
wet SiO2
Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14005 100 0.3 None Prime CZ P/B <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 233
B14004 100 0.5 None Prime CZ P/B <100> 1 5 500 20 DSP 2 Flats None <5 <30 <30 <20@0.3 0
A14010 100 0.5 None Prime CZ N/Ph <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
B14005 100 0.5 None Prime CZ N/Ph <100> 1 5 500 20 DSP 2 Flats None <5 <30 <30 <20@0.3 0
M14004 100 0.5 None Prime CZ N/Ph <100> 1 5 525 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14068 100 0.3 None Prime CZ N/Ph <111>
ON
1 5 275 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
A14024 100 0.5 300nm
SiO2
Prime CZ P/B <100> 1 5 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14018 100 0.5 None Prime CZ N/Ph <111>
4 OFF
1 5 525 25 SSP 2 Flats None <6 <30 <30 <15@0.3 0
L14006 100 0.3 None Prime CZ N/Ph <100> 1 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
P14028 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 SSP 2 Flats None <5 <20 <20 <10@0.3 0
M14012 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 SSP 2 Flats yes <10 <30 <30 <15@0.3 0
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14246 100 0.3 None Prime CZ P/B <100> 1 10 925 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14246 100 0.3 None Prime CZ P/B <100> 1 10 925 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14040 100 0.3 None Prime CZ P/B <100> 1 10 925 20 DSP 2 Flats None <5 <30 <30 <10@0.3 100
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 115
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14040 100 0.3 None Prime CZ P/B <100> 1 10 1000 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
M14013 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats yes <10 <30 <30 <15@0.3 0
M14009 100 0.5 None Prime CZ N/Ph <100> 1 10 500 25 DSP 2 Flats None <5 <30 <30 <15@0.3 0
M14014 100 0.5 None Prime CZ N/Ph <100> 1 10 300 20 DSP 1 Flat None <10 <30 <30 <15@0.3 0
K14001 100 0.5 None Prime CZ P/B <100> 1 10 200 10 DSP 2 Flat None <5 <20 <20 SEMI cleaned 0
BB14001 100 0.3 None Prime CZ P/B <100> 1 10 200 10 DSP 2 Flat None <5 <30 <30 <10@0.5 0
M14024 100 0.3 None Prime CZ P/B <100> 1 10 200 10 DSP 2 Flats None <5 <30 <30 <10@0.5 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14007 100 0.5 None Prime CZ N/Ph <100> 1 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 155
L14037 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14037 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14037 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14011 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <3 <20 <25 <10@0.3 0
L14011 100 0.3 None Prime CZ P/B <100> 1 10 300 15 DSP 2 Flats None <3 <20 <25 <10@0.3 0
L14157 100 0.3 None Prime CZ N/Ph <100> 1 10 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 75
L14013 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <3 <10 <25 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
M14007 100 0.5 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <3 <30 <30 <15@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <20 <25 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14038 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14014 100 0.3 None Prime CZ P/B <100> 1 10 380 15 DSP 2 Flats None <5 <30 <30 <20@0.2 185
L14233 100 0.3 None Prime CZ P/B <100> 1 10 275 20 DSP 2 Flats None <5 <30 <30 <20@0.2 84
L14043 100 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <5 <30 <30 <20@0.2 48
L14043 100 0.3 None Prime CZ N/Ph <100> 1 10 275 15 DSP 2 Flats None <5 <30 <30 <20@0.2 0
L14116 100 0.3 None Prime CZ P/B <100> 1 10 380 15 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14116 100 0.3 None Prime CZ P/B <100> 1 10 380 15 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14116 100 0.3 None Prime CZ P/B <100> 1 10 380 15 SSP 2 Flats None <5 <30 <30 <10@0.3 121
L14070 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14070 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14070 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 SSP 2 Flats None <5 <30 <30 <10@0.3 174
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <10@0.3 17
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <10@0.3 0
M14001 100 0.5 None Prime CZ N/Ph <100> 1 10 400 25 DSP 2 Flat None <5 <30 <30 <15@0.5 0
A14031 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14042 100 0.3 None Prime CZ N/Ph <100> 1 10 380 10 DSP 2 Flats None <5 <30 <30 <20@0.2 0
A14031 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14032 100 0.5 None Prime CZ P/B <111>
ON
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14032 100 0.5 None Prime CZ P/B <111>
ON
1 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
C14010 100 0.5 None Prime CZ P/B <110> 1 10 300 10 DSP 2 Flats None <5 <25 <25 <15@0.3 0
C14011 100 0.5 None Prime CZ P/B <110> 1 10 300 10 DSP 2Flats Yes <5 <20 <20 <15@0.3 0
BO14004 100 0.3 None Prime CZ N/Ph <100> 1 10 400 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14190 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14190 100 0.5 None Prime CZ P/B <111>
4 OFF
1 10 525 20 SSP 1 Flat None <10 <30 <30 <15@0.3 225
J14008 100 0.5 None Prime CZ P/B <111> 1 10 525 20 DSP 1 Flat None <10 <30 <30 <15@0.3 50
N14008 100 0.5 None Prime CZ P/B <110> 1 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.5 19
E14001 100 0.5 None Prime CZ P/B <100> 2 8 380 15 DSP 2 Flats None <3 <30 <30 <15@0.3 0
C14008 100 0.5 None Prime CZ P/B <100> 2 10 300 20 SSP 2 Flats None <8 <30 <30 <30@0.3 0
C14009 100 0.5 None Prime CZ N/Ph <110> 3 9 525 25 SSP 2 Flats None <5 <20 <20 <30@0.3 0
M14005 100 0.5 None Prime CZ N/Ph <110> 3 10 515 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
A14021 100 0.5 None Prime CZ N/Ph <100> 3 12 365 15 SSP 2 Flats None <10 <30 <30 <15@0.3 0
A14026 100 0.5 None Prime CZ N/Ph <100> 2,1 3,9 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14007 100 0.5 None Prime CZ P/B <100> 4 7 525 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
I14021 100 0.3 None Prime CZ P/B <110> 1 10 525 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
M14055 100 0.5 None Prime CZ P/B <100> 1 100 100 5 DSP 2 Flats None <10       0
L14200 100 0.3 None Prime CZ N/Ph <100> 1 100 840 10 Etched 2 Flats None <10 <30 <30 / 50
L14201 100 0.3 None Prime CZ N/Ph <100> 1 100 380 10 Etched 2 Flats None <10 <30 <30 / 95
L14092 100 0.3 None Prime CZ P/B <100> 3 6 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
E14032 100 0.3 None Prime CZ P/B <100> 1 100 100 10 DSP 2 Flats None <10 <40 <50 / 0
L14028 100 0.3 None Prime CZ P/B <100> 4 7 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14219 100 0.3 None Prime CZ P/B <100> 5 10 200 10 SSP 2 Flats None <10 < 30 < 30 <15@0.3 162
L14220 100 0.3 None Prime CZ P/B <100> 5 10 200 10 DSP 2 Flats None <10 < 30 < 30 <15@0.3 0
L14220 100 0.3 None Prime CZ P/B <100> 5 10 200 10 DSP 2 Flats None <10 < 30 < 30 <15@0.3 214
L14191 100 0.3 None Prime CZ P/B <100> 5 10 250 10 SSP 2 Flats None <5 < 30 < 30 <10@0.3 218
A14004 100 0.5 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P14001 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
A14012 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P14007 100 0.3 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 523
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 1.730
BO14030 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 364
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14016 100 0.3 None Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14050 100 0.3 20 nm
dry SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
A14033 100 0.5 None Dummy CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <15@0.3 0
B14007 100 0.5 None Prime CZ P/B <111>
4 OFF
5 10 525 20 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14043 100 0.5 None Prime CZ P/B <111>
ON
5 10 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
I14019 100 0.3 None Prime CZ P/B <110> 5 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.5 0
L14077 100 0.3 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14077 100 0.3 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.3 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.3 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.3 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14077 100 0.5 None Prime CZ P/B <100> 5 10 300 15 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
Z14102 100 0.3 285 nm
dry SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 42
Z14014 100 0.3 300 nm
wet SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14010 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14029 100 0.5 None Prime CZ P/B <100> 5 10 525 20 DSP 2 Flats None <5 <30 <30 <20@0.2 300
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
BO14033 100 0.3 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 757
Z14033 100 0.5 500 nm
wet SiO2
Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14003 100 0.5 None Prime CZ N/Ph <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
B14006 100 0.5 None Prime CZ P/B <100> 1 20 525 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
P14008 100 0.5 None Prime CZ P/B <100> 1 20 525 20 SSP 2 Flats None <5 <20 <20 <10@0.3 0
K14002 100 0.5 None Prime CZ N/Ph <100> 1 20 525 25 DSP 2 Flats None <5 <30 <30 <15@0.3 0
B14008 100 0.5 None Prime CZ P/B <100> 1 20 250 25 DSP 2 Flats None <5 <30 <30 <15@0.3 0
M14008 100 0.5 None Prime CZ P/B <110> 1 20 500 20 DSP 2 Flats None <10 <40 <40 <15@0.3 0
L14014 100 0.5 None Prime CZ P/B <100> 1 30 200 20 SSP 2 Flats None <5 <30 <30 SEMI cleaned 0
M14002 100 0.5 None Prime CZ P/B <100> 1 30 300 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
M14017 100 0.5 None Prime CZ P/B <100> 1 30 300 20 DSP 2 Flats None <5 <20 <20 <15@0.3 0
L14030 100 0.3 None Prime CZ P/B <100> 1 30 400 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
E14010 100 0.5 None Prime CZ N/Ph <100> 5 10 525 25 SSP 2 Flats None <10 <30 <30 <10@0.3 0
Z14058 100 0.5 2000 nm
wet SiO2
Prime CZ P/B <100> 5 10 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 20
L14198 100 0.3 None Prime CZ P/B <111> 5 10 525 20 SSP 1 Flat None <5 < 30 < 30 <10@0.3 63
BO14005 100 0.3 None Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14005 100 0.3 None Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 290
AH14003 100 0.3 500 nm
SiN
Prime CZ P/B <100> 8 12 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 50
L14030 100 0.3 None Prime CZ P/B <100> 1 30 400 20 SSP 2 Flats None <5 <30 <30 <15@0.3 25
M14016 100 0.5 None Prime CZ P/B <100> 1 30 525 25 DSP 2 Flats None <5 <20 <20 <15@0.3 0
M14019 100 0.5 None Prime CZ P/B <100> 1 30 525 25 DSP 2 Flats None <2 <20 <20 <15@0.3 0
L14025 100 0.3 None Prime CZ P/B <100> 1 30 1000 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
M14018 100 0.5 None Prime CZ P/B <111> 7 21 500 25 DSP 1 Flat None <10 <30 <30 <15@0.3 0
P14029 100 0.5 None Prime CZ N/Ph <100> 10 15 525 20 SSP 2 Flats None <5 <20 <20 <10@0.3 0
A14005 100 0.5 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14005 100 0.5 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
P14006 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
P14006 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 <20 <20 <15@0.3 0
L14226 100 0.3 None Prime CZ P/B <100> 1 30 525 25 SSP 2 Flats None <5 <30 <30 <10@0.25 10
L14025 100 0.3 None Prime CZ P/B <100> 1 30 1000 20 SSP 2 Flats None <5 <30 <30 <10@0.3 125
L14215 100 0.3 None Prime CZ P/B <100> 1 30 279 20 DSP 2 Flats None <5 <20 <30 <15@0.3 71
L14027 100 0.2 None Prime CZ P/B <100> 12 16 525 20 SSP 2 Flats None <5 < 25 < 25 <10@0.3 0
A14025 100 0.5 None Prime CZ P/B <111> 10 20 525 20 SSP 1 Flat None <5 <30 <30 <15@0.3 0
M14006 100 0.5 None Prime CZ P/B <111> 10 20 515 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A14006 100 0.3 1500 nm
SiO2
Prime CZ P/B <100> 10 20 525 25 SSP 2 Flats None <10 < 30 < 30 <15@0.3 0
M14003 100 0.5 None Prime CZ P/B <100> 10 20 525 25 DSP 2 Flats None <5 <30 <30 <15@0.3 0
K14003 100 0.5 100nm
SiO2
Prime CZ P/B <100> 10 20 210 10 DSP 2 Flats None <5 <30 <30 <10@0.5 0
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14166 100 0.3 None Prime CZ P/B <100> 10 15 525 10 SSP 2 Flats None <10 < 30 < 30 <20@0.2 0
L14166 100 0.3 None Prime CZ P/B <100> 10 15 525 10 SSP 2 Flats None <10 < 30 < 30 <20@0.2 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 322
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
L14017 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14031 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 382
BO14016 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 0
AH14002 100 0.3 500 nm
SiN
Prime CZ P/B <100> 1 20 525 20 SSP 2 Flats None <5 < 30 < 30 <20@0.2 7
Z14055 100 0.3 150 nm
LPCVD SiN
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14040 100 0.3 50 nm
dry SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 25
Z14042 100 0.3 450 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14052 100 0.3 500 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14122 100 0.3 300 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 0
Z14086 100 0.3 1000 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 75
Z14152 100 0.3 1500 nm
wet SiO2
Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats None <5 < 30 < 30 <10@0.3 100
L14194 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 12
L14194 100 0.3 None Prime CZ P/B <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14195 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats Yes <10 < 30 < 30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 17
BO14034 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <20@0.2 522
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
Z14095 100 0.3 100 nm
dry SiO2
Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14029 100 0.3 None Prime CZ P/B <100> 10 20 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 86
L14237 100 0.3 None Prime CZ P/B <100> 10 20 400 20 DSP 1 Flat None <5 <30 <30 <20@0.3 27
BO14021 100 0.3 None Prime CZ P/B <100> 10 20 400 20 DSP 1 Flat None <5 <30 <30 <30@0.2 266
L14245 100 0.3 None Prime CZ N/Ph <100> 10 20 350 10 DSP 2 Flats None <5 <30 <30 <20@0.3 175
L14110 100 0.3 None Prime CZ P/B <100> 10 20 350 15 DSP 2 Flats None <5 <30 <30 <20@0.3 0
L14216 100 0.3 None Prime CZ P/B <100> 10 20 300 15 DSP 2 Flats None <5 <30 <30 <20@0.3 58
L14082 100 0.3 None Prime CZ P/B <100> 10 20 725 20 DSP 2 Flats None <5 <30 <30 <10@0.3 52
L14012 100 0.3 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
A14013 100 0.5 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
A14028 100 0.5 None Prime CZ N/Ph <100> 10 20 525 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14112 100 0.3 None Prime CZ P/B <100> 10 30 1250 25 lapped 1 Flat None <5 <30 <30 SEMI cleaned 0
L14049 100 0.3 None Prime CZ N/Ph <100> 10 30 525 20 DSP 2 Flats None <5 < 30 < 30 <10@0.3 0
BO14007 100 0.3 None Prime CZ P/B <100> 15 25 380 10 DSP 2 Flats None <5 <20 <25 <20@0.2 66
A14014 100 0.5 None Prime CZ P/B <100> 20 30 525 20 SSP 2 Flats None <5 <30 <30 <30@0.3 0
K14020 100 0.5 yes Prime CZ N/Ph <100> 20 30 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14083 100 0.3 None Prime CZ N/Ph <100> 30 50 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14024 100 0.3 None Prime CZ P/B <100> 40 50 380 5 DSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14163 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 275
A14087 100 0.5 None Prime CZ un-
doped
<100> > 100 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
100 mm (FZ)
L14020 100 0.3 None Prime FZ N/Ph <100> 0,1 1 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14015 100 0.3 None Prime FZ P/B <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14209 100 0.3 None Prime FZ N/Ph <100> 1 3 525 20 SSP 2 Flats None <5 <30 <30 <15@0.3 0
L14210 100 0.3 None Prime FZ N/Ph <100> 1 3 525 20 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14169 100 0.3 None Prime FZ N/Ph <100> 1 5 279 25 As cut 1 Flat None <10 <25 <40 / 20
L14183 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 As cut 2 Flats None / / / / 10
L14181 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 SSP 2 Flats None <10 <30 <30 <15@0.3 5
L14181 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14168 100 0.3 None Prime FZ N/Ph <100> 1 5 275 25 DSP 1 Flat None <5 <30 <30 <15@0.3 0
L14178 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <20@0.2 600
BU14006 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <20@0.2 24
L14241 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <40 <10@0.3 0
L14196 100 0.3 None Prime FZ N/Ph <111> 1 5 280 20 DSP 2 Flats None <10 <30 <40 <10@0.3 64
L14182 100 0.3 None Prime FZ N/Ph <100> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14177 100 0.3 None Prime FZ N/Ph <100> 1 5 285 15 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14052 100 0.3 None Prime FZ N/Ph <100> 1 10 250 15 SSP 2 Flats None <5 <30 <30 <20@0.2 0
L14052 100 0.3 None Prime FZ N/Ph <100> 1 10 250 15 SSP 1 Flat None <5 <30 <30 <20@0.2 0
L14205 100 0.3 None Prime FZ P/B <100> 1 5 250 25 SSP 2 Flats None <10 <30 <30 <10@0.3 50
L14204 100 0.3 None Prime FZ P/B <100> 1 5 250 25 DSP 2 Flats None <10 <30 <40 <10@0.3 0
L14206 100 0.3 None Prime FZ P/B <100> 1 5 275 25 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14206 100 0.3 None Prime FZ P/B <100> 1 5 275 25 DSP 2 Flats None <10 <30 <30 <10@0.3 61
L14244 100 0.3 None Prime FZ P/B <111> 1 5 280 20 DSP 2 Flats None <10 <30 <30 <10@0.3 50
L14180 100 0.3 None Prime FZ P/B <100> 1 5 285 15 DSP 2 Flats None <10 <30 <30 <15@0.3 5
L14184 100 0.3 None Prime FZ P/B <100> 1 5 280 20 As cut 2 Flats None / / / / 10
L14115 100 0.3 None Prime FZ N/Ph <100> 7 10 250 15 SSP 1 Flat None <5 <30 <30 <20@0.2 150
E14009 100 0.5 None Prime FZ P/B <100> > 100 525 25 DSP 2 Flats None <10 <30 <30 <15@0.3 0
L14218 100 0.3 None Prime FZ un-
doped
<100> > 100 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14218 100 0.3 None Prime FZ un-
doped
<100> > 100 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 108
L14032 100 0.3 None Prime FZ P/B <100> 100 250 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
C14005 100 0.5 None Prime FZ N/Ph <111> 120 150 650 10 SSP 2 Flats None <10 <30 <30 <15@0.3 0
C14006 100 0.5 None Coin Rolled FZ N/Ph <111> 200   320 10 SSP 2 Flats None       SEMI cleaned 0
I14006 100 0.5 None Prime FZ N/Ph <111> 1000 2000 355 15 DSP 1 Flat None <10 <30 <30 <15@0.3 0
L14172 100 0.3 None Prime FZ P/B <100> 140 360 525 25 SSP 1 Flat None <5 <30 <30 <20@0.2 9
F14003 100 0.5 1000nm
wet SiO2
Prime FZ N/Ph <100> 1.000 3.000 525 15 DSP 2 Flats None <2 <5 <10 <10@0.2 0
F14001 100 0.5 None Prime FZ N/Ph <100> 1000 3000 525 15 DSP 2 Flats None <2 <5 <10 <10@0.2 0
C14007 100 0.5 None Prime FZ N/Ph <111> 1.200 3.000 300 20 SSP 2 Flats None <10 <30 <30 <15@0.3 0
M14015 100 0.5 None Prime FZ N/Ph <100> 1450 2530 2000 25 DSP 2 Flats None <10 / / / 0
L14002 100 0.3 None Prime FZ N/Ph <100> > 3.000 300 15 DSP 2 Flats None <5 <20 <30 <10@0.2 0
M14020 100 0.3 None Prime FZ N/Ph <100> > 3.000 525 25 SSP 1 Flat None <5 <30 <30 <15@0.3 0
M14021 100 0.3 None Prime FZ N/Ph <100> > 3.000 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 0
L14276 100 0.3 None Prime FZ N/Ph <100> 2500 5.500 200 20 DSP 2 Flats None <5 <30 <30 <15@0.3 164
L14212 100 0.3 None Prime FZ N/Ph <100> > 3.000 525 25 SSP 1 Flat None <10 <30 <30 <15@0.3 32
M14022 100 0.3 None Prime FZ N/Ph <100> > 3.000 525 25 SSP 1 Flat None >10 <30 <30 <15@0.3 0
M14023 100 0.3 None Prime FZ N/Ph <100> > 3.000 380 15 SSP 1 Flat None <3 <10 <20 <15@0.3 0
F14002 100 0.5 None Prime FZ N/Ph <100> 3000 5000 300 15 DSP 2 Flats None <5 <20 <40 <10@0.2 0
M14010 100 0.5 None Prime FZ N/Ph <100> > 5.000 200 15 DSP 1 Flat None <5 <40 <40 <15@0.3 0
L14197 100 0.3 None Prime FZ N/Ph <111> > 3.000 525 20 SSP 1 Flat None <10 <30 <30 <10@0.3 0
BB14004 100 0.5 None Prime FZ N/Ph <100> > 5.000 200 20 DSP 1 Flat None <5 <30 <30 <10@0.5 10
BB14005 100 0.5 None Prime FZ N/Ph <100> > 5.000 300 20 DSP 1 Flat None <5 <30 <30 <10@0.3 0
L14056 100 0.3 None Prime FZ P/B <100> > 5.000 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14056 100 0.3 None Prime FZ P/B <100> > 5.000 300 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14264 100 0.3 None Prime FZ N/Ph <100> > 5.000 300 20 SSP 2 Flats None <5 <30 <30 <10@0.3 140
L14230 100 0.3 None Prime FZ P/B <100> > 5.000 525 20 SSP 1 Flat None <5 <30 <40 <10@0.3 60
L14078 100 0.3 None Prime FZ N/Ph <100> > 10.000 380 20 DSP 2 Flats None <5 <30 <30 <10@0.3 26
E14003 100 0.5 None Prime FZ P/B <100> > 10.000 400 15 DSP 2 Flats None <5 <30 <30 <15@0.3 0
L14031 100 0.3 None Prime FZ N/Ph <100> > 10.000 525 20 SSP 2 Flats None <5 <30 <30 <10@0.3 0
L14036 100 0.3 None Prime FZ N/Ph <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14036 100 0.3 None Prime FZ N/Ph <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14035 100 0.3 None Prime FZ N/Ph <111> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14175 100 0.3 None Prime FZ N/Ph <111> > 10.000 300 25 SSP 2 Flats None <10 <30 <30 <15@0.3 0
L14114 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 SSP 1 Flat None <5 <30 <40 <10@0.3 47
L14018 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 0
L14018 100 0.3 None Prime FZ P/B <100> > 10.000 525 20 DSP 2 Flats None <5 <30 <30 <10@0.3 125
L14202 100 0.3 None Prime FZ P/B <100> > 10.000 300 20 DSP 2 Flats None <10 <30 <30 <10@0.3 49
L14086 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 0
L14086 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 31
L14086 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 DSP 2 Flats None <10 <30 <30 <10@0.3 100
BF14003 100 0.3 None Prime FZ Intrinsic <100> > 10.000 1000 25 DSP 1 Flat None <10 <30 <30 <15@0.3 17
L14087 100 0.3 None Prime FZ Intrinsic <100> > 10.000 525 20 SSP 2 Flats None <10 <30 <30 <10@0.3 0
125 mm
E15006 125 0.3 LTO on
back
Test CZ N/Sb <100> 0,01 0,03 375 20 SSP 1 Flat on
Front
<10 <30 <30 <10@0.5 0
L15002 125 0.5 None Prime CZ P/B <100> 10 20 525 25 SSP 2 Flats None <10 <30 <30 <20@0.3 0
L15001 125 0.3 None Coin Rolled FZ N/Ph <111> 130 150 600 10 lapped None None <5 / / / 29
L15008 125 0.5 None Test CZ P/B <100> > 1 625 15 SSP 2 Flats None <10 <35 <35 <15@0.3 0
L15007 125 0.3 None Prime CZ P/B <100> 1 30 625 15 SSP 2 Flats None <5 <30 <30 <15@0.3 0
150 mm (Test/Monitor)
L16084 150 0.3 None Test CZ P/B <100> 1 30 675 25 SSP 1 Flat None <10 <40 <40 <25@0.3 0
L16060 150 0.3 None Test CZ P/B <100> 1 50 675 25 SSP 1 Flat None <10 <40 <40 <30@0.3 0
BO16003 150 0.3 None Test CZ N/Ph <100> 4 7 625 20 SSP 1 Flat None <5 <30 <30 <10@0.2 0
E16015 150 0.3 None Test CZ P/B <100> 5 30 675 25 SSP 1 Flat None <3 <30 <30 <30@0.3 0
W16026 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
W16027 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat front <10 <30 <30 <20@0.3 0
W16028 150 0.3 None Test CZ P/B <100> 5 30 650 25 SSP 1 Flat back <10 <30 <30 <20@0.3 0
E16041 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
E16041 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <5 <40 <40 <20@0.3 0
BM16003 150 0.3 None Mechanical CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
Z16069 150 0.3 Resist Mechanical CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 44
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 0
BM16004 150 0.3 None Test CZ P/B <100> 1 10 675 25 SSP 1 Flat None <10 <40 <40 <30@0.2 968
W16003 150 0.3 None Monitor CZ P/B <100> 5 30 650 25 SSP 1 Flat any <10 <30 <30 <50@0.16 100
W16008 150 0.3 None Test CZ P/B <100> 5 30 675 25 SSP 1 Flat None <25 <30 <30 <20@0.3 0
W16019 150 0.3 None Test CZ P/B <100> 10 20 650 25 SSP 1 Flat None <20 <30 <30 <20@0.3 0
W16017 150 0.3 None Test CZ P/B <100> 10 20 675 25 SSP 1 Flat None <25 <30 <30 <20@0.3 0
150 mm (Dummy/Reclaim)                                     0
W16002 150 0.3 None Reclaim CZ P/B <100> 1 100 >580   SSP 1 Flat None <20 <40 <60 <30@0.2 0
BO16002 150 0.3 None Dummy CZ N/Ph <100> 4 7 625 20 SSP 1 Flat None <5 <30 <30 / 0
W16009 150 0.3 None Dummy CZ P/B <100> 5 30 675 25 SSP 1 Flat None <25 <30 <30 SEMI cleaned 0
W16020 150 0.3 None Dummy CZ P/B any 10 20 650 25 SSP 1 Flat None / / / / 0
W16016 150 0.3 None Dummy CZ P/B any 10 20 675 25 SSP 1 Flat None / / / / 0
W16016 150 0.3 None Dummy CZ P/B any 10 20 675 25 SSP 1 Flat None / / / / 0
150 mm (CZ)
A16008 150 0.3 None Prime CZ P/B <100> < 0,005 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
A16008 150 0.3 None Prime CZ P/B <100> < 0,005 675 20 SSP 1 Flat None <5 <30 <30 <20@0.3 0
A16007 150 0.3 None Prime CZ N/As <100> < 0,005 675 25 SSP 1 Flat None <10 <30 <30 <20@0.3 0
BO16014 150 0.3 None Prime CZ P/B <100> < 0,005 300 15 DSP 1 Flat None <5 <30 <40 <20@0.3 175
L16155